Martin Wolf
at Trelleborg Sealing Solutions
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper
Alan Astbury, Martin Wolf, Christoph Wehmann, Ambarish Kulkarni, Murat Gulcur
Proceedings Volume 12953, 129530Z (2024) https://doi.org/10.1117/12.3009958
KEYWORDS: Finite element methods, Design, Viscoelasticity, Vacuum, Semiconductors, Data modeling, Temperature metrology, Semiconductor manufacturing, Modeling, Deformation

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