Dr. Meiliana Siauw Profile

Dr. Meiliana Siauw

at Univ of Queensland

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Publications (2)

Proceedings Article | 27 March 2017 Presentation + Paper

Embedded top-coat for reducing the effect out of band radiation in EUV lithography

Ke Du, Meiliana Siauw, David Valade, Marek Jasieniak, Nico Voelcker, Peter Trefonas, Jim Thackeray, Idriss Blakey, Andrew Whittaker

Proceedings Volume 10146, 101460D (2017) https://doi.org/10.1117/12.2270480

KEYWORDS: Polymers, Polymerization, Extreme ultraviolet lithography, Electron beam lithography, Photoresist materials, Polymer thin films, Extreme ultraviolet, Semiconducting wafers, Refractive index, Absorbance

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Proceedings Article | 21 March 2016 Paper

Systematic investigation of the synthesis, characterization and switching mechanism of metal oxide nanoparticle resists

Meiliana Siauw, Ke Du, David Valade, Peter Trefonas, James Thackeray, Andrew Whittaker, Idriss Blakey

Proceedings Volume 9779, 97790J (2016) https://doi.org/10.1117/12.2219638

KEYWORDS: Nanoparticles, Metals, Oxides, Extreme ultraviolet lithography, Photoresist materials, Optical lithography, Electron beam lithography, Scanning electron microscopy, Materials processing, Photoresist developing, Particles, Zirconium, Hafnium, Transmission electron microscopy

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