Ms. Minako Azumi Profile

Minako Azumi

at Nikon Corp

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Publications (4)

Proceedings Article | 5 October 2016 Paper

Correction of deflection under mask’s own weight by bending mask technology

Takashi Yagami, Takashi Kambayashi, Minako Azumi

Proceedings Volume 9985, 99851X (2016) https://doi.org/10.1117/12.2241153

KEYWORDS: Photomasks, Polishing, Surface finishing, Glasses, Lithography, Sensors, Silica, Manufacturing, Semiconductors, Optical properties

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Proceedings Article | 23 November 2015 Paper

Laser damage of calcium fluoride by ArF excimer laser irradiation

M. Azumi, E. Nakahata

Proceedings Volume 9632, 963213 (2015) https://doi.org/10.1117/12.2192195

KEYWORDS: Polarization, Calcium, Excimer lasers, Crystals, Laser induced damage, Laser irradiation, Absorption, Laser crystals, Crystal optics, Transmittance

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Proceedings Article | 4 December 2010 Paper

Study of relation between crystal structure and laser damage of calcium fluoride

Minako Azumi, Eiichiro Nakahata

Proceedings Volume 7842, 78421U (2010) https://doi.org/10.1117/12.869770

KEYWORDS: Crystals, Calcium, Laser crystals, Excimer lasers, Laser induced damage, Laser sources, Microscopes, Crystallography, Nd:YAG lasers, Optical microscopes

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Proceedings Article | 21 December 2007 Paper

Study of haze in artificially grown single crystal CaF2

M. Azumi

Proceedings Volume 6720, 67201N (2007) https://doi.org/10.1117/12.760768

KEYWORDS: Air contamination, Calcium, Oxygen, Crystals, Transmission electron microscopy, Infrared radiation, Scattering, Transmittance, X-rays, Light scattering

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