Mr. Mingon Lee Profile

Mingon Lee

at Dongbu HiTek Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 15 April 2008 Paper

Study for high voltage gate RIE process in LDI (LCD driver IC) device fabrication

Min Gon Lee, Chung Kyung Jung, Sang Wook Ryu, Kang Hyun Lee, Jae Won Han

Proceedings Volume 6923, 69233U (2008) https://doi.org/10.1117/12.773231

KEYWORDS: Oxides, Plasma, Reactive ion etching, Optical lithography, Etching, Scanning electron microscopy, Polymers, LCDs, Diffractive optical elements, Ions

Read Abstract +

Proceedings Article | 26 March 2008 Paper

Study of shallow trench isolation dry etching process using oxide hard mask and KrF photo-resist in 90 nm stand-alone flash device

Eunsang Cho, Mingon Lee, Dongwon Shin, Sangil Hwang, Sangwook Ryu, Kanghyun Lee

Proceedings Volume 6923, 69233V (2008) https://doi.org/10.1117/12.773264

KEYWORDS: Etching, Silicon, Silica, Optical lithography, Dry etching, Light sources, Image processing, Chemical mechanical planarization, Chemistry, Scanning electron microscopy

Read Abstract +

Proceedings Article | 7 March 2008 Paper

Double patterning in lithography for 65nm node with oxidation process

Eunsoo Jeong, Jeahee Kim, Kwangsun Choi, Minkon Lee, Doosung Lee, Myungsoo Kim, Chansik Park

Proceedings Volume 6924, 692424 (2008) https://doi.org/10.1117/12.772544

KEYWORDS: Silicon, Oxides, Double patterning technology, Etching, Optical lithography, Photomasks, Lithography, Photoresist processing, Thermal oxidation, Oxidation

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years