Mr. Nafees A. Kabir Profile

Nafees A. Kabir

at Intel

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Publications (2)

Proceedings Article | 10 April 2024 Presentation

DSA materials and processes development for ≤ P24 EUV resist L/S pattern rectification

Eungnak Han, Gurpreet Singh, Tayseer Mahdi, Robert Seidel, Sandra Murcia, Lauren Doyle, Nityan Nair, Nafees Kabir, Sean Pursel, David Shykind, Todd Hoppe, Florian Gstrein

Proceedings Volume PC12956, PC129560P (2024) https://doi.org/10.1117/12.3012612

KEYWORDS: Directed self assembly, Extreme ultraviolet, Materials processing, Extreme ultraviolet lithography, Block copolymers, Surface roughness, Scanners, Optical lithography, Objectives, Fabrication

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Proceedings Article | 30 April 2023 Presentation

Plasma etch challenges and innovations to enable sub-26nm pitch L/S patterning with high-NA EUV

Nafees Kabir

Proceedings Volume PC12499, PC124990G (2023) https://doi.org/10.1117/12.2658512

KEYWORDS: Plasma etching, Optical lithography, Etching, Plasma, Extreme ultraviolet, Logic, Extreme ultraviolet lithography, Semiconductors, Scanners, Fourier transforms

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