Dr. Nan Liu
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 10 May 2013
Nan Liu, Jingbei Liu, Jie Lin, Graham Davies, Peng Jin, Dou Zhang
JM3, Vol. 12, Issue 02, 023005, (May 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.2.023005
KEYWORDS: Polymerization, Oxygen, FT-IR spectroscopy, Polymers, Diffusion, Photoresist processing, Ultraviolet radiation, Process control, Process modeling, Optoelectronics

Proceedings Article | 31 January 2013 Paper
Proceedings Volume 8759, 875951 (2013) https://doi.org/10.1117/12.2015118
KEYWORDS: Optical fabrication, Ultraviolet radiation, UV optics, Dry etching, Lenses, Molybdenum, Optical arrays, Optical testing, Silica, Reactive ion etching

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