Dr. Nobuhiro Kato Profile

Dr. Nobuhiro Kato

at Kindai Univ

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 3 November 2003 Paper

Fabrication of polymer cantilevers for force-controlled atomic force microscope

Nobuhiro Kato, Choong Sik Park, Toshiro Matsumoto, Hisao Kikuta, Koichi Iwata

Proceedings Volume 5183, (2003) https://doi.org/10.1117/12.505434

KEYWORDS: Silicon, Oxides, Photomasks, Atomic force microscope, Actuators, Polymers, Semiconducting wafers, Anisotropic etching, Scanning electron microscopy, Sensors

Read Abstract +

We developed the fabrication process of all-plastic cantilever for force controlled atomic force microscope. The force controlled atomic force microscope can prevent damage during the scanning of the soft sample. However it has a drawback in its stability. To stabilize the system the cantilever is required to have small Q factor. The negative photo resist for MEMS (SU-8) has ideal properties, micromachinability and small Q factor, for this purpose. Here we demonstrate the cantilever consists of tip, lever and base with same polyimide. The mold of the probing tip is the pyramidal pit pattern on silicon wafer formed by direct leaser writing and anisotropic etching of silicon. Other elements of the cantilever are formed by contact lithography. The photo mask is also fabricated by direct laser writing. By arranging the dimensions of the cantilever, we can control its spring constant and resonant frequency. For the spring constant of 0.1N/m and the first resonant frequency of 2kHz, the typical dimensions of the cantilever is 1030 x 300 x 7 μm³. The fabrication error in cantilever geometry was 1.5%. The estimated resonant frequency has a good agreement with the designed value.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years