Oliver Lohse
at KLA MIE GmbH
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 September 2022 Paper
P. Y. Portnichenko, F. Oezdogan, L. Dawahre, O. Lohse, B. Kalsbeck, P. Jain, H. Steigerwald, S. Ismail, F. Laske
Proceedings Volume 12325, 123250E (2022) https://doi.org/10.1117/12.2642100
KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Metrology, Reticles, Optical alignment, Particles, Manufacturing, Defect inspection

Proceedings Article | 20 October 2021 Presentation + Paper
P. Portnichenko, F. Oezdogan, L. Dawahre, O. Lohse, B. Kalsbeck, P. Jain, H. Steigerwald, S. Ismail, F. Laske
Proceedings Volume 11855, 1185504 (2021) https://doi.org/10.1117/12.2600957
KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Metrology, Reticles, Optical alignment, Particles, Manufacturing, Defect inspection, Silicon

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