Dr. Olivier Dubreuil
at CEA-LETI
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12053, PC1205308 (2022) https://doi.org/10.1117/12.2615831
KEYWORDS: Metrology, Signal detection, Scanning electron microscopy, Model-based design, Reliability, Signal to noise ratio, Semiconductors, Semiconductor manufacturing, Process control, Optical proximity correction

Proceedings Article | 26 May 2022 Poster + Paper
Élie Sezestre, Juline Scoarnec, Jonathan Pradelles, Loïc Perraud, Aurélien Fay, Sébastien Bérard-Bergery, Jessy Bustos, Jean-Baptiste Henry, Olivier Dubreuil, Ivanie Mendes, Charles Valade, Alexandre Moly, Alice Batte, Nivea Schuch, Frederic Robert, Thiago Figueiro
Proceedings Volume 12053, 120531G (2022) https://doi.org/10.1117/12.2616527
KEYWORDS: Scanning electron microscopy, Metrology, Image processing, Calibration, Optical proximity correction, Edge detection, Mathematical modeling, Evolutionary algorithms, Detection and tracking algorithms

Proceedings Article | 26 May 2022 Poster + Paper
Proceedings Volume 12051, 120510Q (2022) https://doi.org/10.1117/12.2614018
KEYWORDS: Reticles, Lithography, Semiconducting wafers, Scanners, Silicon, Overlay metrology, Scanning electron microscopy, Process control, Image processing, Photomasks, Immersion lithography

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