Dr. Ren Yang Profile

Dr. Ren Yang

SPIE Involvement:

Author

Publications (13)

Proceedings Article | 23 February 2008 Paper

Batch patterning micro circuits and sensors with excimer laser machine

Ren Yang, Ralph Pyka, Dennis Kramer, John Mata, Matt Souter, Steven Thompson

Proceedings Volume 6880, 68800T (2008) https://doi.org/10.1117/12.761957

KEYWORDS: Laser ablation, Metals, Thin films, Sensors, Polymer thin films, Polymers, Excimer lasers, Optical lithography, Positron emission tomography, Gold

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Proceedings Article | 23 January 2006 Paper

Microfabrication and test of pre-aligned fiber bundle couplers with integrated microlens array

Ren Yang, Steven Soper, Wanjun Wang

Proceedings Volume 6113, 61130Y (2006) https://doi.org/10.1117/12.650177

KEYWORDS: Microlens array, Fiber couplers, Microlens, Photomasks, Collimators, Optical fibers, Lithography, Ultraviolet radiation, Polymers, Light sources

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Proceedings Article | 22 January 2005 Paper

Fabrication of out-of-plane refractive concave and convex microlens arrays

Ren Yang, Steven Soper, Wanjun Wang

Proceedings Volume 5717, (2005) https://doi.org/10.1117/12.601832

KEYWORDS: Microlens array, Microlens, Lithography, Fiber couplers, Photomasks, Optical components, Polymers, Integrated optics, Free space optics, System integration

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Proceedings Article | 22 January 2005 Paper

Microfabrication of an integrated SU-8 waveguide with an embedded focusing lens for application in single-molecule detection (SMD)

Ren Yang, Steven Soper, Wanjun Wang

Proceedings Volume 5718, (2005) https://doi.org/10.1117/12.591956

KEYWORDS: Waveguides, Microlens, Lithography, Microfluidics, Polymethylmethacrylate, Multiplexing, Polymers, Prototyping, Microfabrication, Charge-coupled devices

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Proceedings Article | 22 January 2005 Paper

UV-LIGA fabrication of microscale two-level mold inserts for MEMS applications

Ren Yang, Jing Jiang, Wanjun Wang, Wen Jin Meng

Proceedings Volume 5717, (2005) https://doi.org/10.1117/12.592640

KEYWORDS: Plating, Nickel, Lithography, Electroplating, Photomasks, Polishing, Diffraction, Prototyping, Microelectromechanical systems, Photoresist processing

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SPIE Journal Paper | 1 December 2004

Numerical and experimental study of an out-of-plane prealigned refractive microlens fabricated using ultraviolet lithography method

Ren Yang, Wanjun Wang

OE, Vol. 43, Issue 12, (December 2004) https://doi.org/10.1117/12.10.1117/1.1814362

KEYWORDS: Microlens, Lithography, Prototyping, Ultraviolet radiation, Photomasks, Numerical simulations, Zemax, Integrated optics, Optical components, Polymers

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Proceedings Article | 24 January 2004 Paper

Fabrication of out-of-plane SU-8 refractive microlens using direct lithography method

Ren Yang, Wanjun Wang

Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.530780

KEYWORDS: Microlens, Lithography, Numerical simulations, Optical components, Glasses, Prisms, Photomasks, Zemax, Optical fabrication, Refraction

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Proceedings Article | 23 December 2003 Paper

Fabrication of biodegradable polymer (PLGA) microstructures and applications in controlled drug delivery

Ren Yang, Tianning Chen, Hualing Chen, Wanjun Wang

Proceedings Volume 5345, (2003) https://doi.org/10.1117/12.530767

KEYWORDS: Polymers, Microfabrication, Prototyping, Photography, Diffusion, Mechanical engineering, Absorbance, Control systems, Microfluidics, Photomasks

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SPIE Journal Paper | 1 October 2003

High-resolution maskless lithography

Kin Foong Chan, Zhiqiang Feng, Ren Yang, Akihito Ishikawa, WenHui Mei

JM3, Vol. 2, Issue 04, (October 2003) https://doi.org/10.1117/12.10.1117/1.1611182

KEYWORDS: Digital micromirror devices, Maskless lithography, Lithography, Microlens array, Glasses, Photomasks, Scanning electron microscopy, Photoresist materials, Microelectromechanical systems, LCDs

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SPIE Journal Paper | 1 July 2003

Design and fabrication of microlens and spatial filter array by self-alignment for maskless lithography systems

Ren Yang, Kin Foong Chan, Zhiqiang Feng, Ishikawa Akihito, WenHui Mei

JM3, Vol. 2, Issue 03, (July 2003) https://doi.org/10.1117/12.10.1117/1.1584445

KEYWORDS: Microlens array, Microlens, Spatial filters, Digital micromirror devices, Maskless lithography, Glasses, Photoresist materials, Lithography, Chromium, Micromirrors

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Proceedings Article | 20 January 2003 Paper

Design and fabrication of microlens and spatial filter array by self-alignment

Ren Yang, Kin Foong Chan, Zhiqiang Feng, Wenhui Mei

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.472865

KEYWORDS: Microlens array, Microlens, Glasses, Maskless lithography, Digital micromirror devices, Spatial filters, Photoresist materials, Metals, Lithography, Semiconductors

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Proceedings Article | 20 January 2003 Paper

High-resolution maskless lithography by the integration of micro-optics and point array technique

Kin Foong Chan, Zhiqiang Feng, Ren Yang, Wenhui Mei

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.472856

KEYWORDS: Digital micromirror devices, Maskless lithography, Semiconductors, Glasses, Photomasks, Scanning electron microscopy, Micro optics, Lithography, Light sources, Lens design

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Proceedings Article | 16 January 2003 Paper

UV-LIGA microfabrication of a power relay based on electrostatic actuation

Ren Yang, Seok Jae Jeong, Wanjun Wang

Proceedings Volume 4981, (2003) https://doi.org/10.1117/12.478171

KEYWORDS: Relays, Connectors, Electrodes, Switches, Polymers, Microrelays, Capacitors, Metals, Switching, Actuators

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Showing 5 of 13 publications

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