Mr. Richard E. Deming Profile

Richard E. Deming

at Intel Corp

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Publications (1)

Proceedings Article | 5 April 2007 Paper

Real time monitoring of reticle etch process tool to investigate and predict critical dimension performance

Rick Deming, Karmen Yung, Mark Guglielmana, Dan Bald, Kiho Baik, Frank Abboud

Proceedings Volume 6518, 65181V (2007) https://doi.org/10.1117/12.712323

KEYWORDS: Data modeling, Performance modeling, Process modeling, Reticles, Etching, Sensors, Metrology, Critical dimension metrology, Manufacturing, Data processing

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