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Dr. Robert Sabia
Development Associate at Corning Incorporated
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Author
Publications (4)
Proceedings Article | 15 March 2007 Paper
Corning ULE glass can meet P-37 specifications
William Rosch, Lorrie Beall, John Maxon, Robert Sabia, Robert Sell
Proceedings Volume 6517, 651724 (2007) https://doi.org/10.1117/12.712160
KEYWORDS: Glasses, Motion models, Photovoltaics, Polishing, Photomasks, Extreme ultraviolet, Surface finishing, Extreme ultraviolet lithography, Surface roughness, Birefringence
Proceedings Article | 6 July 2006 Paper
Corning 7972 ULE material for segmented and large monolithic mirror blanks
Proceedings Volume 6273, 627302 (2006) https://doi.org/10.1117/12.672059
KEYWORDS: Mirrors, Glasses, Manufacturing, Polishing, Surface finishing, Silicon carbide, Lightweight mirrors, Zerodur, Thermography, Distortion
Proceedings Article | 23 March 2006 Paper
Characterization of striae in ULE for EUVL optics and masks
William Rosch, Lorrie Beall, John Maxon, Robert Sabia, Robert Sell
Proceedings Volume 6151, 615122 (2006) https://doi.org/10.1117/12.656355
KEYWORDS: Birefringence, Surface roughness, Glasses, Polishing, Photomasks, Heat treatments, Extreme ultraviolet lithography, Surface finishing, Chemistry, Line scan image sensors
Proceedings Article | 1 July 2002 Paper
Characterization and characteristics of a ULE glass tailored for EUVL needs
Kenneth Hrdina, Benjamin Hanson, Philip Fenn, Robert Sabia
Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472321
KEYWORDS: Glasses, Metrology, Extreme ultraviolet lithography, Ultrasonics, Inspection, Polishing, Silica, Surface finishing, Spatial resolution, Photomasks
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