Dr. Robin M. Walton
Business Development Manager at Corning Technology Ctr
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 26 June 2003 Paper
Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485404
KEYWORDS: Coating, Photomasks, Silicon, Lithography, Silica, Phase shifts, Sputter deposition, Optical properties, Surface roughness, Birefringence

Proceedings Article | 21 December 1999 Paper
Robin Walton, Richard Cavicchi, Stephen Semancik, Balaji Panchapakesan, Don DeVoe, Maria Aquino-Class, James Allen, John Suehle
Proceedings Volume 3853, (1999) https://doi.org/10.1117/12.372861
KEYWORDS: Sensors, Microsensors, Hydrogen, Temperature metrology, Oxides, Platinum, Chemical elements, Copper, Chemical analysis, Palladium

Proceedings Article | 18 November 1999 Paper
Richard Cavicchi, Stephen Semancik, Robin Walton, Balaji Panchapakesan, Don DeVoe, Maria Aquino-Class, James Allen, John Suehle
Proceedings Volume 3857, (1999) https://doi.org/10.1117/12.370293
KEYWORDS: Sensors, Oxides, Chemical vapor deposition, Chemical elements, Metals, Temperature metrology, Tin, Resistance, Gas sensors, Gases

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