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Shaokai Wang
at Harbin Institute of Technology
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Publications (1)
Proceedings Article | 6 March 2015 Paper
Error mechanism analyses of an ultra-precision stage for high speed scan motion over a large stroke
Proceedings Volume 9446, 94462Q (2015) https://doi.org/10.1117/12.2181186
KEYWORDS: Actuators, Remote sensing, Servomechanisms, Error analysis, Magnetism, Reticles, Motion analysis, Linear filtering, Semiconducting wafers, Computer simulations
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