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Shunta Sugisaki
at Ushio Inc
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Publications (2)
Proceedings Article | 10 April 2024 Presentation
Interference lithography system consisting high precision pitch control and automatically beam alignment modules
Yohei Nawaki, Kohei Toyoda, Shunta Sugisaki, Shinji Orihara, Toru Nomura, Kentaro Nomoto, Kazuyuki Tsuruoka
Proceedings Volume PC12956, PC129560J (2024) https://doi.org/10.1117/12.3010198
KEYWORDS: Lithography, Automatic alignment, Control systems, Beam controllers, Automatic control, Semiconducting wafers, Optical lithography, Optical alignment, Metrology, Waveguides
Proceedings Article | 16 March 2023 Presentation + Paper
Scanning overlapped phase interference lithography system for manufacturing optical waveguide combiner
Yohei Nawaki, Kentaro Nomoto, Shunta Sugisaki, Shinji Orihara, Kazuyuki Tsuruoka
Proceedings Volume 12449, 1244907 (2023) https://doi.org/10.1117/12.2667155
KEYWORDS: Lithography, Waveguides, Semiconducting wafers, Fringe analysis, Optical scanning systems, Diffraction gratings, Manufacturing, Photoresist materials, Scanning electron microscopy, Glasses
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