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Dr. Sofiane Guissi
at Coventor Inc A Lam Research Co
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 20 March 2019 Presentation + Paper
Backside power delivery as a scaling knob for future systems
Bharani Chava, Khaja Ahmad Shaik, Anne Jourdain, Sofiane Guissi, Pieter Weckx, Julien Ryckaert, Geert Van Der Plaas, Alessio Spessot, Eric Beyne, Anda Mocuta
Proceedings Volume 10962, 1096205 (2019) https://doi.org/10.1117/12.2514942
KEYWORDS: Metals, Logic, Standards development, Semiconducting wafers, Resistance, Clocks, Switches, Silicon, Chemical mechanical planarization, Device simulation
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