Mr. Sungmin Jo Profile

Sungmin Jo

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 10 August 2023 Presentation + Paper

RCWA acceleration for channel-hole structures with a neural network

Hyomin Ahn, Yoonsung Bae, Jeung Song, Namyoon Kim, Joonyoung Ahn, Sungmin Jo, Wookrae Kim, Myungjun Lee

Proceedings Volume 12619, 126190G (2023) https://doi.org/10.1117/12.2680983

KEYWORDS: Scattering, Neural networks, Light scattering, Diffraction, Data modeling, Machine learning

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SPIE Journal Paper | 20 April 2022 Open Access

Toward realization of high-throughput hyperspectral imaging technique for semiconductor device metrology

Changhyeong Yoon, Gwangsik Park, Daehoon Han, Sang-il Im, Sungmin Jo, Jinseob Kim, Wookrae Kim, Changhoon Choi, Myungjun Lee

JM3, Vol. 21, Issue 02, 021209, (April 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021209

KEYWORDS: Semiconducting wafers, Cameras, Critical dimension metrology, Semiconductors, Spectral resolution, Spatial resolution, Hyperspectral imaging, Imaging systems, Metrology, Wafer-level optics

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