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TaeSun Kim
at SAMSUNG Electronics Co Ltd
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Publications (2)
Proceedings Article | 13 March 2018 Paper
Improved control of multi-layer overlay in advanced 8nm logic nodes
Tae-Sun Kim, Young-Sik Park, Yong-Chul Kim, Byoung-Hoon Kim, Ji-Hun Lee, Min-Keun Kwak, Sung-Won Choi, Joon-Soo Park, Hong-Cheon Yang, Philipp Meixner, Dong-jin Lee, Oh-Sung Kwon, Hyun-Su Kim, Jin-Tae Park, Sung-Min Lee, Cedric Grouwstra, Vidar van der Meijden, Mohamed El Kodadi, Chris Kim, Pierre-Yves Guittet, Tjitte Nooitgedagt
Proceedings Volume 10585, 1058527 (2018) https://doi.org/10.1117/12.2297099
KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Overlay metrology, Logic, Metrology, Diffraction, Target acquisition, Performance modeling, Diffraction gratings
Proceedings Article | 29 March 2013 Paper
Negative tone imaging (NTI) with KrF: extension of 248nm IIP lithography to under sub-20nm logic device
Tae-Hwan Oh, Tae-Sun Kim, Yura Kim, Jahee Kim, Sujeong Heo, Bumjoon Youn, Jaekyung Seo, Kwang-Sub Yoon, Byoung-il Choi
Proceedings Volume 8682, 86820P (2013) https://doi.org/10.1117/12.2011426
KEYWORDS: Photoresist processing, Lithography, Photomasks, Optical lithography, Logic devices, Image processing, Ion implantation, Chemically amplified resists, Scanning electron microscopy, Nanoimprint lithography
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