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Taejoo Hwang
at Rensselaer Polytechnic Institute
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Publications (1)
Proceedings Article | 30 December 2003 Paper
BCB wafer bonding for microfluidics
Taejoo Hwang, Dan Popa, Jeongsik Sin, Harry Stephanou, Eric Leonard
Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.524621
KEYWORDS: Microfluidics, Wafer bonding, Silicon, Photomasks, Semiconducting wafers, Micromachining, Quantum wells, Deep reactive ion etching, HF etching, Glasses
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