Jian Wang
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 December 2023 Poster + Paper
Jianyao Luo, Jianke Li, Haiyang Quan, Jian Wang, Song Hu
Proceedings Volume 12769, 127691H (2023) https://doi.org/10.1117/12.2688938
KEYWORDS: Wavefront errors, Calibration, Spherical lenses, Wavefronts, Interferometers, Error analysis, Design, Control systems, Wavefront aberrations, Light sources

Proceedings Article | 4 April 2023 Paper
Proceedings Volume 12617, 126176M (2023) https://doi.org/10.1117/12.2666722
KEYWORDS: Lithography, Mathematical optimization, Matrices, Lithographic illumination, Genetic algorithms, Particle swarm optimization, Image processing, Source mask optimization, Coherence imaging, Technology

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