CONFERENCE PROCEEDINGS
Advanced Search
Wolf-Juergen Faust
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 29 September 1998 Paper
Optical measurement methods for MEMS applications
Volker Grosser, C. Bombach, Wolf Faust, Dietmar Vogel, Bernd Michel
Proceedings Volume 3407, (1998) https://doi.org/10.1117/12.323337
KEYWORDS: Microelectromechanical systems, Microelectronics, Actuators, Interferometry, Optical testing, Reliability, Sensors, Mirrors, Microsystems, Optics manufacturing
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top