Prof. Xiaochuan Xu Profile

Prof. Xiaochuan Xu

Professor at Harbin Institute of Technology, Shenzhen

SPIE Involvement:

Author

Publications (46)

Proceedings Article | 17 March 2023 Poster + Paper

Experimental observation of the exceptional point in a nanocylinder-loaded silicon microring

Jiewen Li, Jinzhao Wang, Rui Li, Yang Feng, Yanmei Li, Lin Yu, Wanxin Li, Yunxu Sun, Yong Yao, Xiaochuan Xu

Proceedings Volume 12424, 1242413 (2023) https://doi.org/10.1117/12.2649479

KEYWORDS: Microrings, Silicon, Reflection, Waveguides, Microresonators, Resonators, Backscatter, Spectral response

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Proceedings Article | 27 December 2022 Presentation + Paper

Reflection and temperature insensitive quantum dot lasers

Wenlu Wang, Zihao Wang, Ting Wang, Jiajian Chen, Jianjun Zhang, Jiawei Wang, Xiaochuan Xu, Yong Yao, Jianan Duan

Proceedings Volume 12311, 123110D (2022) https://doi.org/10.1117/12.2643959

KEYWORDS: Lasers, Temperature metrology, Laser damage threshold, Photonic integrated circuits, Technology, Quantum dot lasers, Optics manufacturing, Thermal stability, Radio optics, Integrated optics

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Proceedings Article | 15 December 2022 Paper

Experimental research on overshoot pump modulated quasi-CW thulium-doped fiber laser around 1940 nm

Yun Chen, Xiaochuan Xu, Yunxu Sun, Nan Zhang, Jian Liu

Proceedings Volume 12478, 124780U (2022) https://doi.org/10.1117/12.2651614

KEYWORDS: Fiber lasers, Modulation, Pulsed laser operation, Continuous wave operation, Semiconductor lasers, Fiber Bragg gratings, Diodes, Cladding, Tunable lasers, Surgery

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Proceedings Article | 5 March 2022 Poster + Presentation + Paper

On-chip silicon-organic hybrid entangled photon pair source

Jinzhao Wang, Yang Wang, Jiewen Li, Rui Li, Yang Feng, Yanmei Li, Jiaxin Chen, Wanxin Li, Yunxu Sun, Yong Yao, Tsuyoshi Michinobu, Xiaochuan Xu

Proceedings Volume 12007, 120070U (2022) https://doi.org/10.1117/12.2613582

KEYWORDS: Waveguides, Silicon, Silicon photonics, Refractive index, Organic materials, Photonics, Lithium, Absorption, Waveguide modes, Signal processing

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Proceedings Article | 5 March 2022 Poster + Presentation + Paper

Optical phased array based on subwavelength grating antennas

Zhengquan Huang, Jiaxin Chen, Weiming Yao, Yunxu Sun, Yong Yao, Jiazhu Duan, Xiangjie Zhao, Xiaochuan Xu

Proceedings Volume 12007, 120070V (2022) https://doi.org/10.1117/12.2613622

KEYWORDS: Silicon photonics, Antennas, Waveguides, Silicon, Phased array optics, Semiconducting wafers, LIDAR, Beam steering, Tunable lasers, Refractive index

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Proceedings Article | 4 March 2022 Presentation + Paper

Exceptional point of nanocylinder-loaded silicon microring for single nanoparticle detection

Jiewen Li, Jinzhao Wang, Rui Li, Yang Feng, Yanmei Li, Lin Yu, Wanxin Li, Jiaxin Chen, Yunxu Sun, Yong Yao, Xiaochuan Xu

Proceedings Volume 11979, 1197903 (2022) https://doi.org/10.1117/12.2613637

KEYWORDS: Microrings, Sensors, Silicon, Nanoparticles, Waveguides, Resonators

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Proceedings Article | 5 March 2021 Presentation + Paper

Ultra-long grating emitters for optical phased array leveraging subwavelength structures

Jiaxin Chen, Wanxin Li, Jiajun Tian, Yunxu Sun, Yong Yao, Xiaochuan Xu

Proceedings Volume 11692, 116920I (2021) https://doi.org/10.1117/12.2578392

KEYWORDS: Phased array optics, Waveguides, Silicon, Silicon photonics, Refractive index, Optical properties, Optical engineering, Optical design, Optical antennas, Modulation

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Proceedings Article | 26 February 2020 Presentation + Paper

Ultrafast self-induced oscillation in a nonlinear subwavelength grating metamaterial ring resonator

Xiaochuan Xu, Yang Wang, Zeyu Pan, Chi-jui Chung, Yue Cheng, Yaguo Wang, Tsuyoshi Michinobu, Ray Chen

Proceedings Volume 11285, 112850H (2020) https://doi.org/10.1117/12.2544344

KEYWORDS: Resonators, Neurons, Picosecond phenomena, Metamaterials, Silicon, Ultrafast phenomena, Waveguides, Absorption, Silicon photonics

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Proceedings Article | 19 March 2019 Presentation + Paper

Dielectric metamaterial waveguide for optical interconnect and sensing

Xiaochuan Xu, Zeyu Pan, Chi-Jui Chung, Ching-Wen Chang, Hai Yan, Ray Chen

Proceedings Volume 10924, 109240T (2019) https://doi.org/10.1117/12.2513817

KEYWORDS: Waveguides, Silicon, Refractive index, Sensors, Metamaterials, Resonators, Silicon photonics, Modulators, Optical interconnects, Optical sensing

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Proceedings Article | 4 March 2019 Presentation

Pedestaled subwavelength grating metamaterial waveguide for sensitivity enhancement (Conference Presentation)

Ching-Wen Chang, Xiaochuan Xu, Swapnajit Chakravarty, Hui-Chun Huang, Quark Yungsung Chen, Li-Wei Tu, Ray T. Chen

Proceedings Volume 10895, 108950P (2019) https://doi.org/10.1117/12.2510648

KEYWORDS: Metamaterials, Microrings, Resonators, Waveguides, Sensors, Silicon, Silicon photonics, Biosensing, Photons, Structural design

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Proceedings Article | 4 March 2019 Presentation

On-chip Fourier transform spectrometer on silicon-on-sapphire (Conference Presentation)

Elham Heidari, Xiaochuan Xu, Chi-Jui Chung, Ray Chen

Proceedings Volume 10923, 109230O (2019) https://doi.org/10.1117/12.2510519

KEYWORDS: Fourier transforms, Spectroscopy, Silicon, Infrared spectroscopy, Infrared radiation, Gases, Chemical species, Free space optics, Planets, FT-IR spectroscopy

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Proceedings Article | 14 March 2018 Presentation

On-chip microwave photonic sensor featuring silicon-polymer hybrid subwavelength grating waveguide and bowtie antenna (Conference Presentation)

Chi-Jui Chung, Xiaochuan Xu, Farzad Mokhtari-Koushyar, Ray Chen

Proceedings Volume 10535, 105350G (2018) https://doi.org/10.1117/12.2290982

KEYWORDS: Antennas, Waveguides, Sensors, Microwave radiation, Microwave photonics, Polymers, Silicon, Electro optic polymers, Polymer multimode waveguides, Signal detection

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Proceedings Article | 2 March 2018 Paper

High-speed modulator based on electro-optic polymer infiltrated subwavelength grating waveguide ring resonator

Zeyu Pan, Xiaochuan Xu, Chi-Jui Chung, Hamed Dalir, Hai Yan, Ke Chen, Yaguo Wang, Baohua Jia, Ray Chen

Proceedings Volume 10538, 105381E (2018) https://doi.org/10.1117/12.2291366

KEYWORDS: Silicon, Waveguides, Modulators, Electro optic polymers, Optical interconnects, Resonators, Polymer multimode waveguides, Polymers, Optical modulators, Sensors

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Proceedings Article | 20 February 2018 Paper

ultrasensitive spectroscopy based on photonic waveguides on Al2O3/SiO2 platform

Elham Heidari, Xiaochuan Xu, Naimei Tang, Farzad Mokhtari-Koushyar, Hamed Dalir, Ray Chen

Proceedings Volume 10501, 105011D (2018) https://doi.org/10.1117/12.2289151

KEYWORDS: Proteins, Waveguides, Aluminum, Spectroscopy, Light-matter interactions, Ultraviolet radiation, Cancer, Absorption, Absorbance, Optical spectroscopy

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Proceedings Article | 28 April 2017 Presentation

High speed attojoule/bit passive and active nanophotonic devices for computing and optical interconnects (Conference Presentation)

Zeyu Pan, Cheng Zhang, Harish Subbaraman, Chi-Jui Chung, Qiaochu Li, Xiaochuan Xu, Xingyu Zhang, L. Jay Guo, Ray Chen

Proceedings Volume 10109, 1010910 (2017) https://doi.org/10.1117/12.2254780

KEYWORDS: Nanophotonics, Active optics, Geometrical optics, Optical interconnects, Electro optic polymers, Printing, Polymers, Logic devices, Logic, Electro optics

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Proceedings Article | 28 April 2017 Presentation

High speed and low power consumption modulator based on electro-optic polymer infiltrated subwavelength grating waveguide ring resonator (Conference Presentation)

Zeyu Pan, Xiaochuan Xu, Yaguo Wang, Baohua Jia, Ray Chen

Proceedings Volume 10108, 1010806 (2017) https://doi.org/10.1117/12.2253092

KEYWORDS: Electro optics, Waveguides, Modulators, Resonators, Electro optic polymers, Very large scale integration, Optical interconnects, Polymers, Silicon, Polymer multimode waveguides

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Proceedings Article | 19 April 2017 Presentation

Ultra-compact electromagnetic wave sensor featuring electro-optics polymer infiltrated one-dimensional photonic-crystal-slotted waveguide (Conference Presentation)

Chi-Jui Chung, Zeyu Pan, Rui Wang, Xiaochuan Xu, Harish Subbaraman, Ray Chen

Proceedings Volume 10103, 101030J (2017) https://doi.org/10.1117/12.2253673

KEYWORDS: Electromagnetic radiation, Planar waveguides, Waveguides, Antennas, Sensors, Polymers, Electro optic polymers, Modulation, Silicon, Teeth

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Proceedings Article | 23 February 2017 Presentation + Paper

Enhanced surface sensitivity in microring resonator biosensor based on subwavelength grating waveguides

Hai Yan, Lijun Huang, Xiaochuan Xu, Naimei Tang, Swapnajit Chakravarty, Ray Chen

Proceedings Volume 10081, 100810G (2017) https://doi.org/10.1117/12.2250408

KEYWORDS: Microrings, Waveguides, Resonators, Biosensors, Silicon, Sensors, Biosensing, Integrated photonics, Wave propagation, Integrated optics, Refractive index, Proteins

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Proceedings Article | 22 February 2017 Presentation + Paper

Low detection limit sensor based on subwavelength grating racetrack resonator

Lijun Huang, Hai Yan, Xiaochuan Xu, Swapnajit Chakravarty, Naimei Tang, Huiping Tian, Ray Chen

Proceedings Volume 10077, 100770M (2017) https://doi.org/10.1117/12.2252429

KEYWORDS: Waveguides, Resonators, Probability theory, Sensors, Nanophotonics, Biosensors, Point-of-care devices, Viruses, Proteins, Breast cancer, Silicon, Refractive index, Microrings, Cladding, Water, Scanning electron microscopy, Magnetic sensors

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Proceedings Article | 20 February 2017 Presentation + Paper

One-dimensional photonic crystal slot waveguide for silicon-organic hybrid electro-optic modulators

Hai Yan, Xiaochuan Xu, Chi-Jui Chung, Harish Subbaraman, Zeyu Pan, Swapnajit Chakravarty, Ray Chen

Proceedings Volume 10109, 101090O (2017) https://doi.org/10.1117/12.2253154

KEYWORDS: Waveguides, Silicon, Modulators, Photonic crystals, Electrooptic modulators, Phase shifts, Slow light, Optical interconnects, Electro optic polymers, Electro optics, Polymers, Teeth, Polymer multimode waveguides, Light wave propagation, Electrodes

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Proceedings Article | 20 February 2017 Presentation + Paper

All-optical switch with 1 ps response time enabled by graphene oxide infiltrated subwavelength grating waveguide

Xiaochuan Xu, Zeyu Pan, Baohua Jia, Yaguo Wang, Ray Chen

Proceedings Volume 10108, 1010805 (2017) https://doi.org/10.1117/12.2252640

KEYWORDS: Switches, Graphene, Oxides, Waveguides, Silicon, Absorption, Terahertz radiation, Refractive index, Polarization, Surface roughness

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Proceedings Article | 17 February 2017 Presentation + Paper

Guided-mode-resonance coupled localized surface plasmons for dually resonance enhanced Raman scattering sensing

Zheng Wang, Chao Liu, Erwen Li, Swapnajit Chakravarty, Xiaochuan Xu, Alan Wang, D. L. Fan, Ray Chen

Proceedings Volume 10080, 1008003 (2017) https://doi.org/10.1117/12.2253383

KEYWORDS: Nanoparticles, Raman scattering, Surface enhanced Raman spectroscopy, Surface plasmons, Resonance enhancement, Raman spectroscopy, Molecules, Silver, Silica, Photonic crystals

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Proceedings Article | 2 May 2016 Paper

RF beam transmission of x-band PAA system utilizing large-area, polymer-based true-time-delay module developed using imprinting and inkjet printing

Zeyu Pan, Harish Subbaraman, Cheng Zhang, Qiaochu Li, Xiaochuan Xu, Xiangning Chen, Xingyu Zhang, Yi Zou, Ashwin Panday, L. Jay Guo, Ray Chen

Proceedings Volume 9747, 97471T (2016) https://doi.org/10.1117/12.2213809

KEYWORDS: Polymers, Printing, Electro optic polymers, Thermal optics, X band, Inkjet technology, Antennas, Modulators, Waveguides, Switches, Picosecond phenomena, Beam steering, Networks

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Proceedings Article | 15 March 2016 Paper

Low-loss curved subwavelength grating waveguide based on index engineering

Zheng Wang, Xiaochuan Xu, D. L. Fan, Yaoguo Wang, Ray Chen

Proceedings Volume 9753, 975318 (2016) https://doi.org/10.1117/12.2213913

KEYWORDS: Waveguides, Refractive index, Silicon, Distortion, Cladding, Scanning electron microscopy, Integrated photonics, Dispersion, Integrated circuit design, Integrated circuits

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Proceedings Article | 15 March 2016 Paper

High quality factor trapezoidal subwavelength grating waveguide micro-ring resonator

Zheng Wang, Xiaochuan Xu, D. L. Fan, Yaguo Wang, Ray Chen

Proceedings Volume 9753, 97530P (2016) https://doi.org/10.1117/12.2213935

KEYWORDS: Silicon, Waveguides, Microrings, Resonators, Sensors, Light-matter interactions, Cladding, Scanning electron microscopy, Silicon photonics, Refractive index

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In recent decades, silicon photonics has attracted intensive research interest in optical communications due to its advantageous compact dimensions and high-volume manufacturability. Particularly, micro-ring resonators on silicon-oninsulator (SOI) platform have been widely exploited as a basic building block for a vast range of applications such as switches, modulators, and sensors. A majority of these applications involve light-matter interaction, which can be substantially enhanced by the high quality factor micro-ring resonators. However, conventional strip waveguide based micro-ring resonators suffer from the intrinsic dilemma in achieving high light confinement and strong light-matter interaction simultaneously. Subwavelength grating (SWG) waveguides, comprised of periodically interleaved high and low refractive index materials with a pitch less than one wavelength, have been demonstrated as a promising alternative. For SWG waveguides built on SOI wafers, the ratio of silicon and cladding materials can be engineered microscopically to achieve desired macroscopic properties. The control of these properties could potentially lead to significant performance improvements compared with conventional micro-ring resonators based photonic devices, such as filters and sensors. However, SWG waveguide based micro-ring resonators (SWGMRs) that have been demonstrated so far can only provide a moderate quality factor (~5600) with a large radius (e.g. 15 μm), which greatly jeopardize the wide spread research efforts in this area. In this paper, we propose to use trapezoidal silicon pillars to reduce the bend loss of SWGMRs to improve the quality factor. For the first time, we experimentally demonstrate the smallest SWGMR (the micro-ring radius equals to 5 μm) with an applicable quality factor as high as 11,500. This approach also can be applied to SWGMRs with larger radii for higher quality factors. We also experimentally demonstrated a 10 μm radius SWGMR that can provide a quality factor up to 45,000. Compared to SWGMRs built with conventional rectangular silicon pillars, the quality factors is increased by 4.6 times from a 5 μm radius SWGMR and 3 times from a 10 μm SWGMR radius, respectively.

Proceedings Article | 3 April 2015 Paper

High efficiency silicon strip waveguide to plasmonic slot waveguide mode converter

Chin-Ta Chen, Xiaochuan Xu, Amir Hosseini, Zeyu Pan, Ray Chen

Proceedings Volume 9368, 936809 (2015) https://doi.org/10.1117/12.2080491

KEYWORDS: Silicon, Waveguides, Plasmonics, Waveguide modes, Absorption, Cladding, Gold, Metals, Refractive index, Interfaces

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Proceedings Article | 3 April 2015 Paper

Multiple-input multiple-output based high density on-chip optical interconnect

Po-Kuan Shen, Xiaochuan Xu, Amir Hosseini, Zeyu Pan, Ray Chen

Proceedings Volume 9368, 936812 (2015) https://doi.org/10.1117/12.2080666

KEYWORDS: Waveguides, Oscillators, Receivers, Signal processing, Silicon, Optical interconnects, Phase shifts, Interference (communication), Homodyne detection, Signal detection

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Proceedings Article | 14 March 2015 Paper

Reconfigurable thermo-optic polymer switch based true-time-delay network utilizing imprinting and inkjet printing

Zeyu Pan, Harish Subbaraman, Cheng Zhang, Ashwin Panday, Qiaochu Li, Xingyu Zhang, Yi Zou, Xiaochuan Xu, L. Guo, Ray Chen

Proceedings Volume 9362, 936214 (2015) https://doi.org/10.1117/12.2080115

KEYWORDS: Switches, Polymers, Waveguides, Printing, Inkjet technology, Thermal optics, Photonics systems, Photonic devices, Antennas, Reactive ion etching

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Proceedings Article | 13 March 2015 Paper

Ultralow-loss waveguide crossings for the integration of microfluidics and optical waveguide sensors

Zheng Wang, Hai Yan, Zongxing Wang, Yi Zou, Chun-Ju Yang, Swapnajit Chakravarty, Harish Subbaraman, Naimei Tang, Xiaochuan Xu, D. Fan, Alan Wang, Ray Chen

Proceedings Volume 9320, 932012 (2015) https://doi.org/10.1117/12.2078384

KEYWORDS: Waveguides, Microfluidics, Sensors, Photonic crystals, Silicon, Waveguide sensors, Oxides, Wave propagation, Optical microcavities, Cladding

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Proceedings Article | 28 February 2015 Paper

Bending behavior of a flexible single crystal nanomembrane photonic crystal cavity

Xiaochuan Xu, Harish Subbaraman, Ray Chen

Proceedings Volume 9367, 936716 (2015) https://doi.org/10.1117/12.2080381

KEYWORDS: Silicon, Photonic crystals, Crystals, Refractive index, Finite element methods, Finite-difference time-domain method, Optical microcavities, Photonic crystal devices, Silicon photonics, Silicon films

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Proceedings Article | 27 February 2015 Paper

Integrated photonic crystal waveguides on silicon-on-sapphire for chemical sensing in mid-infrared

Yi Zou, Swapnajit Chakravarty, Xiaochuan Xu, Ray Chen

Proceedings Volume 9367, 93670T (2015) https://doi.org/10.1117/12.2080266

KEYWORDS: Waveguides, Silicon, Mid-IR, Photonic crystals, Refractive index, Absorption, Dispersion, Sapphire, Finite-difference time-domain method, Integrated photonics

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Proceedings Article | 28 March 2014 Paper

Bridging the gap from mask to physical design for multiple patterning lithography

Bei Yu, Jhih-Rong Gao, Xiaoqing Xu, David Pan

Proceedings Volume 9053, 905308 (2014) https://doi.org/10.1117/12.2048626

KEYWORDS: Optical lithography, Lithography, Photomasks, 193nm lithography, Electron beam lithography, Double patterning technology, Manufacturing, Bridges, Design for manufacturability, Metals

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Proceedings Article | 8 March 2014 Paper

Silicon nanomembrane-based compact true-time-delay module on unconventional substrates

Harish Subbaraman, Xiaochuan Xu, Ray Chen

Proceedings Volume 8990, 89900H (2014) https://doi.org/10.1117/12.2039852

KEYWORDS: Waveguides, Photonic crystals, Silicon, Brain-machine interfaces, Glasses, Infrared cameras, Etching, Infrared imaging, Silicon photonics, Adaptive optics

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Proceedings Article | 8 March 2014 Paper

High-performance conformal sensors employing single-crystal silicon nanomembranes

Xiaochuan Xu, Harish Subbaraman, Swapnajit Chakravarty, Ray Chen

Proceedings Volume 8990, 89900U (2014) https://doi.org/10.1117/12.2039888

KEYWORDS: Silicon, Photonic crystals, Etching, Waveguides, Optical microcavities, Single mode fibers, Photonic devices, Polymers, Refractive index, Sensors

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Proceedings Article | 8 March 2014 Paper

Integrated strip and slot waveguides in silicon-on-sapphire for mid infrared VOC detection in water

Yi Zou, Harish Subbaraman, Swapnajit Chakravarty, Xiaochuan Xu, Amir Hosseini, Wei-Cheng Lai, Ray Chen

Proceedings Volume 8990, 89900X (2014) https://doi.org/10.1117/12.2040412

KEYWORDS: Waveguides, Mid-IR, Absorbance, Silicon, Absorption, Wave propagation, Infrared spectroscopy, Water, Sapphire, Absorption spectroscopy

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Proceedings Article | 27 March 2013 Paper

Electric field sensor based on electro-optic polymer refilled silicon slot photonic crystal waveguide coupled with bowtie antenna

Xingyu Zhang, Amir Hosseini, Xiaochuan Xu, Shiyi Wang, Qiwen Zhan, Yi Zou, Swapnajit Chakravarty, Ray Chen

Proceedings Volume 8624, 862418 (2013) https://doi.org/10.1117/12.2005925

KEYWORDS: Silicon, Doping, Waveguides, Antennas, Polymers, Photonic crystals, Electro optic polymers, Electric field sensors, Geometrical optics, Slow light

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Proceedings Article | 14 March 2013 Paper

Large area transferred silicon nanomembrane photonic devices on unconventional substrates

Xiaochuan Xu, Harish Subbaraman, Amir Hosseini, David Kwong, Ray Chen

Proceedings Volume 8629, 86291G (2013) https://doi.org/10.1117/12.2005565

KEYWORDS: Silicon, Glasses, Etching, Silicon photonics, Photonic devices, Waveguides, Deep reactive ion etching, Polymers, Adhesives, Brain-machine interfaces

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Proceedings Article | 14 March 2013 Paper

Silicon nanomembrane based photonic crystal waveguide true-time-delay lines on a glass substrate

Harish Subbaraman, Xiaochuan Xu, Che-Yun Lin, Amir Hosseini, Ray Chen

Proceedings Volume 8629, 86291E (2013) https://doi.org/10.1117/12.2004731

KEYWORDS: Photonic crystals, Waveguides, Glasses, Silicon, Silicon photonics, Etching, Scanning electron microscopy, Crystals, Photonic devices, Polymers

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Proceedings Article | 27 February 2013 Paper

Vertically integrated double-layer on-chip crystalline silicon nanomembranes based on adhesive bonding

Yang Zhang, David Kwong, Xiaochuan Xu, Amir Hosseini, Sang Yang, John Rogers, Ray Chen

Proceedings Volume 8630, 863019 (2013) https://doi.org/10.1117/12.2005440

KEYWORDS: Silicon, Nanostructures, Fiber couplers, Waveguides, Adhesives, Nanolithography, Crystals, Photonic crystals, Refractive index, Silicon photonics

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Proceedings Article | 27 February 2013 Paper

Low loss polycrystalline silicon waveguides and devices for multilayer on-chip optical interconnects

David Kwong, Amir Hosseini, John Covey, Yang Zhang, Xiaochuan Xu, Ray Chen

Proceedings Volume 8630, 863012 (2013) https://doi.org/10.1117/12.2005720

KEYWORDS: Waveguides, Silicon, Crystals, Wave propagation, Brain-machine interfaces, Scattering, Photonic crystals, Silica, Amorphous silicon, Light wave propagation

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Proceedings Article | 27 February 2013 Paper

Subwavelength grating couplers for efficient light coupling into silicon nanomembrane based photonic devices

Harish Subbaraman, Xiaochuan Xu, John Covey, Ray Chen

Proceedings Volume 8630, 86301C (2013) https://doi.org/10.1117/12.2004707

KEYWORDS: Silicon, Glasses, Photonic devices, Waveguides, Silicon photonics, Etching, Polarization, Optical design, Photonic crystals, Deep reactive ion etching

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Proceedings Article | 11 October 2012 Paper

Metrology and instrumentation challenges with high-rate, roll-to-roll manufacturing of flexible electronic systems

Harish Subbaraman, Xiaohui Lin, Xiaochuan Xu, Ananth Dodabalapur, L. Jay Guo, Ray Chen

Proceedings Volume 8466, 846603 (2012) https://doi.org/10.1117/12.940778

KEYWORDS: Manufacturing, Electronics, Flexible circuits, Metrology, Inspection, Optics manufacturing, Printing, Telecommunications, Control systems, Software development

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Proceedings Article | 2 February 2012 Paper

Silicon nanomembranes for high-performance flexible photonic interconnects and devices

Harish Subbaraman, Xiaochuan Xu, Nassibe Rahimi, Amir Hosseini, Ray Chen

Proceedings Volume 8267, 82670H (2012) https://doi.org/10.1117/12.906852

KEYWORDS: Waveguides, Silicon, Photonic crystals, Etching, Semiconducting wafers, Photonic devices, Optical interconnects, Oxides, Adhesives, Printing

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Proceedings Article | 21 February 2011 Paper

Phase shifter using carbon nanotube thin-film transistor for flexible phased-array antenna

Daniel Pham, Harish Subbaraman, Maggie Yihong Chen, Xiaochuan Xu, Ray Chen

Proceedings Volume 7936, 793604 (2011) https://doi.org/10.1117/12.876158

KEYWORDS: Antennas, Switches, Phase shifts, Printing, Silver, Carbon nanotubes, Thin films, Transistors, Metals, Electrodes

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Proceedings Article | 10 February 2011 Paper

Transfer and characterization of silicon nanomembrane-based photonic devices on flexible polyimide substrate

Xiaochuan Xu, Harish Subbaraman, Daniel Pham, Amir Hosseini, Xiaohui Lin, Ray Chen

Proceedings Volume 7944, 79440F (2011) https://doi.org/10.1117/12.876037

KEYWORDS: Silicon, Waveguides, Photonic devices, Silicon photonics, Semiconducting wafers, Oxides, Brain-machine interfaces, Printing, Photoresist materials, Oxygen

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