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Yingxia Jin
at Peking Univ
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Publications (1)
Proceedings Article | 3 February 2009 Paper
Study on clamped-clamped beam in-plane capacitive resonators
Yingxia Jin, Yaquan Tang, Xiaomei Yu
Proceedings Volume 7159, 71590P (2009) https://doi.org/10.1117/12.811950
KEYWORDS: Resonators, Silicon, Electrodes, Etching, Silica, Micromachining, Optical simulations, Numerical simulations, Fabrication, Capacitance
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