Dr. Yoshifumi Ueno Profile

Dr. Yoshifumi Ueno

at Univ of California San Diego

SPIE Involvement:

Author

Publications (23)

Proceedings Article | 8 April 2011 Paper

Investigation on the interaction of long duration Nd:YAG laser pulse with Sn plasma for an EUV metrology source

Y. Tao, Y. Ueno, S. Yuspeh, R. Burdt, M. Tillack, F. Najmabadi

Proceedings Volume 7969, 796930 (2011) https://doi.org/10.1117/12.881223

KEYWORDS: Extreme ultraviolet, Pulsed laser operation, Plasma, Nd:YAG lasers, Tin, Ions, Metrology, Extreme ultraviolet lithography, Laser energy, Carbon dioxide lasers

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Proceedings Article | 20 March 2010 Paper

Experimental and numerical investigations on the density profile of CO2 laser-produced Sn plasma for an EUVL source

Y. Tao, Y. Ueno, S. Yuspeh, R. Burdt, N. Amin, N. Shaikh, M. Tillack, F. Najmabadi

Proceedings Volume 7636, 76360D (2010) https://doi.org/10.1117/12.848407

KEYWORDS: Carbon dioxide lasers, Plasma, Tin, Pulsed laser operation, Carbon dioxide, Extreme ultraviolet, Extreme ultraviolet lithography, Nd:YAG lasers, Laser beam diagnostics, Absorption

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Proceedings Article | 18 May 2009 Paper

Characterization of tin vapor from CO[sub]2[/sub] laser produced EUV light source

Yoshifumi Ueno, Tatsuya Yanagida, Takashi Suganuma, Hiroshi Komori, Akira Sumitani, Akira Endo

Proceedings Volume 7361, 73610X (2009) https://doi.org/10.1117/12.820966

KEYWORDS: Tin, Ions, Liquids, Plasma, Carbon dioxide lasers, Laser induced fluorescence, Solids, Chemical species, Extreme ultraviolet, Pulsed laser operation

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Proceedings Article | 18 March 2009 Paper

Laser-produced plasma source development for EUV lithography

Akira Endo, Hiroshi Komori, Yoshifumi Ueno, Krzysztof Nowak, Yabu Takayuki, Yanagida Tatsuya, Takashi Suganuma, Takeshi Asayama, Hiroshi Someya, Hideo Hoshino, Masaki Nakano, Masato Moriya, Toshihiro Nishisaka, Tamotsu Abe, Akira Sumitani, Hitoshi Nagano, Youichi Sasaki, Shinji Nagai, Yukio Watanabe, Georg Soumagne, Takanobu Ishihara, Osamu Wakabayashi, Kouji Kakizaki, Hakaru Mizoguchi

Proceedings Volume 7271, 727108 (2009) https://doi.org/10.1117/12.813639

KEYWORDS: Plasma, Tin, Carbon dioxide lasers, Extreme ultraviolet, Magnetism, Laser development, Pulsed laser operation, Extreme ultraviolet lithography, Ions, Laser systems engineering

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Proceedings Article | 12 May 2008 Paper

Magnetic field for efficient exhaustion of CO2 laser-produced Sn plasma in EUV light source

Yoshifumi Ueno, Georg Soumagne, Takashi Suganuma, Takayuki Yabu, Masato Moriya, Hiroshi Komori, Tamotsu Abe, Akira Endo, Akira Sumitani

Proceedings Volume 7005, 70052U (2008) https://doi.org/10.1117/12.782475

KEYWORDS: Tin, Magnetism, Plasma, Ions, Carbon dioxide lasers, Mirrors, Extreme ultraviolet, Light sources, Carbon dioxide, Nd:YAG lasers

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Proceedings Article | 21 March 2008 Paper

Magnetic debris mitigation of a CO2 laser-produced Sn plasma

Yoshifumi Ueno, Georg Soumagne, Masato Moriya, Takashi Suganuma, Tamotsu Abe, Hiroshi Komori, Akira Endo, Akira Sumitani

Proceedings Volume 6921, 69212Z (2008) https://doi.org/10.1117/12.771817

KEYWORDS: Tin, Plasma, Magnetism, Carbon dioxide lasers, Ions, Mirrors, Silicon, Extreme ultraviolet, Gold, Statistical analysis

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Proceedings Article | 20 March 2008 Paper

CO2 laser-produced Sn-plasma source for high-volume manufacturing EUV lithography

Akira Endo, Hideo Hoshino, Takashi Suganuma, Krzysztof Nowak, Tatsuya Yanagida, Takayuki Yabu, Takeshi Asayama, Yoshifumi Ueno, Masato Moriya, Masaki Nakano, Hiroshi Someya, Toshihiro Nishisaka, Tamotsu Abe, Georg Soumagne, Hiroshi Komori, Hakaru Mizoguchi, Akira Sumitani, Koichi Toyoda

Proceedings Volume 6921, 69210T (2008) https://doi.org/10.1117/12.771959

KEYWORDS: Tin, Carbon dioxide lasers, Extreme ultraviolet, Ions, Magnetism, Mirrors, Plasma, Pulsed laser operation, Light sources, Carbon dioxide

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Proceedings Article | 13 September 2007 Paper

CO2 laser-produced Sn plasma as the solution for high-volume manufacturing EUV lithography

Akira Endo, Tamotsu Abe, Hideo Hoshino, Yoshifumi Ueno, Masaki Nakano, Takeshi Asayama, Hiroshi Komori, Georg Soumagne, Hakaru Mizoguchi, Akira Sumitani, Koichi Toyoda

Proceedings Volume 6703, 670309 (2007) https://doi.org/10.1117/12.732254

KEYWORDS: Gas lasers, Tin, Carbon monoxide, Extreme ultraviolet, Plasma, Pulsed laser operation, Carbon dioxide lasers, Light sources, Magnetism, Ions

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Proceedings Article | 21 March 2007 Paper

Characterization of various Sn targets with respect to debris and fast ion generation

Yoshifumi Ueno, Hideo Hoshino, Tatsuya Ariga, Taisuke Miura, Masaki Nakano, Hiroshi Komori, Georg Soumagne, Akira Endo, Hakaru Mizoguchi, Akira Sumitani, Koichi Toyoda

Proceedings Volume 6517, 65173B (2007) https://doi.org/10.1117/12.711226

KEYWORDS: Tin, Gas lasers, Ions, Plasma, Carbon monoxide, Nd:YAG lasers, Extreme ultraviolet, Glasses, Solids, Mirrors

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Proceedings Article | 21 March 2007 Paper

Small field exposure tool (SFET) light source

Tamotsu Abe, Takashi Suganuma, Masato Moriya, Takayuki Yabu, Takeshi Asayama, Hiroshi Someya, Yoshifumi Ueno, Georg Soumagne, Akira Sumitani, Hakaru Mizoguchi

Proceedings Volume 6517, 65173C (2007) https://doi.org/10.1117/12.711241

KEYWORDS: Plasma, Xenon, Light sources, Extreme ultraviolet, Mirrors, Optical filters, Actuators, Laser development, Extreme ultraviolet lithography, High power lasers

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Proceedings Article | 19 March 2007 Paper

Laser-produced EUV light source development for HVM

Akira Endo, Hideo Hoshino, Takashi Suganuma, Masato Moriya, Tatsuya Ariga, Yoshifumi Ueno, Masaki Nakano, Takeshi Asayama, Tamotsu Abe, Hiroshi Komori, Georg Soumagne, Hakaru Mizoguchi, Akira Sumitani, Koichi Toyoda

Proceedings Volume 6517, 65170O (2007) https://doi.org/10.1117/12.711097

KEYWORDS: Gas lasers, Carbon monoxide, Tin, Extreme ultraviolet, Plasma, Pulsed laser operation, Nd:YAG lasers, Light sources, Optical amplifiers, Ions

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Proceedings Article | 23 March 2006 Paper

Development of CO₂ laser produced Xe plasma EUV light source for microlithography

Hakaru Mizoguchi, Akira Endo, Tatsuya Ariga, Taisuke Miura, Hideo Hoshino, Yoshifumi Ueno, Masaki Nakano, Hiroshi Komori, Akira Sumitani, Tamotsu Abe, Takashi Suganuma, Georg Soumagne, Hiroshi Someya, Yuichi Takabayashi, Koichi Toyoda

Proceedings Volume 6151, 61510S (2006) https://doi.org/10.1117/12.656941

KEYWORDS: Gas lasers, Carbon monoxide, Plasma, Pulsed laser operation, Xenon, Extreme ultraviolet, Ions, Magnetism, Laser irradiation, Oscillators

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Proceedings Article | 31 August 2005 Paper

EUV characteristics of a high power and high repetition rate CO2 laser driven Xe plasma

Hiroshi Komori, Yoshifumi Ueno, Hideo Hoshino, Tatsuya Ariga, Akira Endo

Proceedings Volume 5918, 59180H (2005) https://doi.org/10.1117/12.616051

KEYWORDS: Plasma, Carbon dioxide lasers, Extreme ultraviolet, Ions, Xenon, Nd:YAG lasers, Pulsed laser operation, Laser irradiation, Light sources, Mirrors

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Proceedings Article | 6 May 2005 Paper

Laser-produced-plasma light source for EUV lithography

Georg Soumagne, Tamotsu Abe, Takashi Suganuma, Yousuke Imai, Hiroshi Someya, Hideo Hoshino, Masaki Nakano, Hiroshi Komori, Yuichi Takabayashi, Tatsuya Ariga, Yoshifumi Ueno, Yasunori Wada, Akira Endo, Koichi Toyoda

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.599333

KEYWORDS: Extreme ultraviolet, Light sources, Xenon, Laser applications, Gas lasers, Laser systems engineering, Nd:YAG lasers, Oscillators, Amplifiers, Extreme ultraviolet lithography

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Proceedings Article | 20 May 2004 Paper

Particle-cluster tin target for a high-conversion efficiency LPP source for EUVL

Toshihisa Tomie, Tatsuya Aota, Jing Quan Lin, Yoshifumi Ueno, Hidehiko Yashiro, Noriaki Kandaka, Hiroki Moriwaki, Gohta Niimi, Isao Matsushima, Kentaro Nishigori

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535395

KEYWORDS: Plasma, Particles, Tin, Extreme ultraviolet, Plasma generation, Extreme ultraviolet lithography, Pulsed laser operation, Solids, Mirrors, Ions

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