Ms. Zuleykhan Tomova Profile

Zuleykhan Tomova

PhD Student

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Publications (4)

Proceedings Article | 19 March 2018 Paper

The state of the art in multicolor visible photolithography

Nikolaos Liaros, Zuleykhan Tomova, Sandra Gutierrez Razo, Samuel Cohen, John Fourkas, Steven Wolf, Matthew Thum, Daniel Falvey, Hannah Ogden, Amy Mullin, Adam Pranda, Gottlieb Oehrlein, John Petersen

Proceedings Volume 10584, 1058407 (2018) https://doi.org/10.1117/12.2297653

KEYWORDS: Photoresist materials, Optical lithography, Lithography, Thin films, Absorption, Molecules, Microscopy, Stimulated emission depletion microscopy, Etching, Point spread functions

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Proceedings Article | 19 March 2018 Paper

Benchmarking 3-color photoresists for multiphoton absorption lithography

Nikolaos Liaros, Sandra Gutierrez Razo, Zuleykhan Tomova, John Petersen, John Fourkas

Proceedings Volume 10584, 1058417 (2018) https://doi.org/10.1117/12.2299318

KEYWORDS: Lithography, Photoresist materials, Molecules, Polymerization, Multiphoton lithography, Visible radiation, Chemistry, Continuous wave operation, Super resolution

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Proceedings Article | 18 March 2015 Paper

Multicolor, visible-light nanolithography

John Fourkas, Zuleykhan Tomova

Proceedings Volume 9426, 94260C (2015) https://doi.org/10.1117/12.2087107

KEYWORDS: Optical lithography, Photoresist materials, Lithography, Molecules, Chemistry, Absorption, Nanolithography, Visible radiation, Diffraction, Semiconductors

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Proceedings Article | 16 March 2015 Paper

Resolution enhancement through three color photolithography

Zuleykhan Tomova, John Fourkas

Proceedings Volume 9353, 935312 (2015) https://doi.org/10.1117/12.2084451

KEYWORDS: Polymerization, Molecules, Optical lithography, Photoresist materials, Absorption, Molecular lasers, Lithography, Resolution enhancement technologies, Visible radiation, Photons

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