Microlens arrays (MLAs) with special functions such as superhydrophobicity and self-cleaning ability are highly desired in the micro-optical system which is often used in easily polluted environment. In this paper, a new method is demonstrated to fabricate the MLAs with a high fill factor and superhydrophobicity. The method combines femtosecond laser wet etching, polydimethylsiloxane (PDMS) replication and subsequently femtosecond laser direct writing process. The fabricated MLAs decorated with micro/nanoscale hierarchical structures compared with the normal MLAs. Water droplets on the as-prepared surfaces exhibit superhydrophobicity and ultralow adhesion which endows the fabricated samples possess self-cleaning property. The as-fabricated MLAs could find their applications in bioscience research, ocean exploration, endoscopic surgery, microfluidic system, etc.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.