Zhengfang Liu
at Siemens EDA
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11328, 1132818 (2020) https://doi.org/10.1117/12.2551682
KEYWORDS: Lithography, Design for manufacturing, Manufacturing, Computer simulations, Databases

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11328, 1132812 (2020) https://doi.org/10.1117/12.2551691
KEYWORDS: Machine learning, Data modeling, Semiconducting wafers, Manufacturing, Silicon, Design for manufacturability, Databases, Data analysis, Neural networks, Roads

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11328, 1132814 (2020) https://doi.org/10.1117/12.2551683
KEYWORDS: Metals, Design for manufacturing, Manufacturing, Particles, Yield improvement, Design for manufacturability, Roads, Polishing, Photomasks, Integrated circuit design

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11328, 1132817 (2020) https://doi.org/10.1117/12.2551681
KEYWORDS: Chemical mechanical planarization, Manufacturing, Optimization (mathematics), Copper, Design for manufacturing, Lithography, Modeling and simulation, Product engineering, Semiconducting wafers, Model-based design

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11328, 113281C (2020) https://doi.org/10.1117/12.2551677
KEYWORDS: Lithography, Standards development, Databases, Photomasks, Statistical analysis, Visualization, Roads, Optics manufacturing, Computer simulations, Metals

Showing 5 of 14 publications
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