Direct Write (7)
New Processes (4)
New Technolgies (5)
Plating (5)
Poster Session (14)
Growth and characterization of shape memory alloy thin films for micropositioning and microactuation
Fabrication of freestanding microstructures using UV lithography and double-electroplating technique
CMOS compatibiltity of high-aspect-ratio micromachining (HARM) in bonded silicon-on-insulator (BSOI)