Recent advance in development of Cr/Sc-based multilayer coatings for water window applications

Evgueni Meltchakov; Blandine Capitanio; Sébastien de Rossi; Eirini Papagiannouli; Pascal Mercere; Franck Delmotte

doi:10.1117/12.3015927

18 June 2024 Recent advance in development of Cr/Sc-based multilayer coatings for water window applications

Evgueni Meltchakov, Blandine Capitanio, Sébastien de Rossi, Eirini Papagiannouli, Pascal Mercere, Franck Delmotte

Author Affiliations +

Proceedings Volume PC13020, Advances in Optical Thin Films VIII; PC130200E (2024) https://doi.org/10.1117/12.3015927
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

Development of multilayer mirrors for the water window (a region between absorption edges of carbon and oxygen, from 282 to 533 eV) remains quite a challenge. Proposed 25 years ago, the Cr/Sc multilayer provides theoretical reflectivity about 60% at near-normal incidence near the Sc L2,3 edge. However, the maximum measured peak reflectance achieved so far just slightly exceeds 20%. We report on our approach to design highly reflective Cr/Sc-based multilayer coatings using a process of nitridation of chromium during deposition and adding boron carbide as a third material in the multilayer structure. We will report on our strategy of optimisation of the CrN/B4C/Sc multilayer system and discuss the main findings and results. The peak reflectance as high as 32% at 397 eV was measured with this type of coating which proves to be potentially interesting for various water window applications such as x-ray microscopy.

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Citation Download Citation

Evgueni Meltchakov, Blandine Capitanio, Sébastien de Rossi, Eirini Papagiannouli, Pascal Mercere, and Franck Delmotte "Recent advance in development of Cr/Sc-based multilayer coatings for water window applications", Proc. SPIE PC13020, Advances in Optical Thin Films VIII, PC130200E (18 June 2024); https://doi.org/10.1117/12.3015927

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