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16 December 1976 Auger Surface Analysis Of Diamond Turned Optics
John G. Gowan, Theodore T. Saito, James R. Buckmelter
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Proceedings Volume 0093, Advances in Precision Machining of Optics; (1976) https://doi.org/10.1117/12.955117
Event: 20th Annual Technical Symposium, 1976, San Diego, United States
Abstract
A Scanning Auger Microprobe was used to examine the surfaces of diamond turned electroplated mirrors and conventionally prepared mirrors. The change in contamination was noted in each, following an ion polishing process and a vacuum annealing process. Carbon and oxygen are the most predominant surface contaminants and are present in the top 12-25A. The depth of contamination was determined by Argon sputter etching the surfaces. Much of the contamination is due just to air. Also discussed are Auger analysis performed in conjunction with our multilayer dielectric enhancement study of 10.6 micron optics. KEY WORDS: Auger spectroscopy, diamond turned mirrors, surface physics, contaminants, dielectric coatings.
© (1976) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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John G. Gowan, Theodore T. Saito, and James R. Buckmelter "Auger Surface Analysis Of Diamond Turned Optics", Proc. SPIE 0093, Advances in Precision Machining of Optics, (16 December 1976); https://doi.org/10.1117/12.955117
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KEYWORDS
Contamination
Diamond
Surface finishing
Polishing
Ions
Copper
Dielectrics
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