Converting A Commercially Available Linnik Microinterferometer Into A Fringe Scanning Optical Profiler

B. Cencic; M. Barut; F. Cepon

doi:10.1117/12.967120

1 January 1987 Converting A Commercially Available Linnik Microinterferometer Into A Fringe Scanning Optical Profiler

B. Cencic, M. Barut, F. Cepon

Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967120
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

As a low cost approach to fringe scanning profilometry, a commercially available Linnik microinterferometer was equipped with a CCD array, interfaced to an IBM PC. The instrument's potentials and limitations will be discussed.

Citation Download Citation

B. Cencic, M. Barut, and F. Cepon "Converting A Commercially Available Linnik Microinterferometer Into A Fringe Scanning Optical Profiler", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967120

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