Paper
12 July 1988 Creating And Observing Surface Features With A Scanning Tunneling Microscope
J Schneir, P K Hansma, V Elings, John Gurley, K Wickramasinghe, R Sonnenfeld
Author Affiliations +
Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944501
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Abstract
Scanning Tunneling Microscopy (STM) can be used to perform lithography on a surface and to image the results of lithography performed using other techniques. We have imaged a 1 nm structure created with the STM on graphite, a 300 nm structure electrodeposited with the STM on gold, and a gold diffraction grating created using a diamond scribe. In addition we present atomic resolution images of graphite showing a surface reconstruction.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J Schneir, P K Hansma, V Elings, John Gurley, K Wickramasinghe, and R Sonnenfeld "Creating And Observing Surface Features With A Scanning Tunneling Microscope", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); https://doi.org/10.1117/12.944501
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Cited by 19 scholarly publications.
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KEYWORDS
Scanning tunneling microscopy

Gold

Lithography

Diffraction gratings

Diamond

Image resolution

Electronics

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