Photophysical Investigations Of Spin Cast Novolac Films

Laura L. Kosbar; Curtis W. Frank

doi:10.1117/12.968312

1 January 1988 Photophysical Investigations Of Spin Cast Novolac Films

Laura L. Kosbar, Curtis W. Frank

Proceedings Volume 0920, Advances in Resist Technology and Processing V; (1988) https://doi.org/10.1117/12.968312
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

Fluorescence techniques were used to study the effects of casting solvent and film thickness on spin cast novolac films. A fluorescent probe, pyrene, was covalently bonded to the novolac backbone, and changes in its fluorescence were used to monitor the effects of casting on the films. The amount of excimer fluorescence depends on casting solvent and rises dramatically for very thin films (<2000 A), perhaps indicating an increase in ordering. Novolac polymers with various levels of pyrene tagging were used to measure the extent of pyrene aggregation. The tagged and free probes had similar responses at low concentrations (<= 5 mol% probe) but at high probe concentrations (20 mol% probe) the free probe aggregates to a greater extent than the tagged probe. The extent of aggregation is also affected by the casting solvent.

Citation Download Citation

Laura L. Kosbar and Curtis W. Frank "Photophysical Investigations Of Spin Cast Novolac Films", Proc. SPIE 0920, Advances in Resist Technology and Processing V, (1 January 1988); https://doi.org/10.1117/12.968312

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