Roughness Study Of Aluminum-Coated Surfaces By Infrared Ellipsometry

S. F. Nee; H. E. Bennett; P. T. Nee

doi:10.1117/12.948011

27 January 1989 Roughness Study Of Aluminum-Coated Surfaces By Infrared Ellipsometry

S. F. Nee, H. E. Bennett, P. T. Nee

Proceedings Volume 0965, Current Developments in Optical Engineering III; (1989) https://doi.org/10.1117/12.948011
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

Ellipsometric parameters for coated aluminum surfaces with roughnesses below 10 nm were measured using an infrared ellipsometer at null operation. The two-phase model was used to fit the ellipsometric data of multiple angles of incidence at a fixed wavelength. The complex dielectric constant, the complex index of refraction, and the deviations of fitting were found to exhibit linear dependency on roughness. These linear relationships can be used to characterize roughness as well as to determine the optical constants of material without ambiguity of roughness.

Citation Download Citation

S. F. Nee, H. E. Bennett, and P. T. Nee "Roughness Study Of Aluminum-Coated Surfaces By Infrared Ellipsometry", Proc. SPIE 0965, Current Developments in Optical Engineering III, (27 January 1989); https://doi.org/10.1117/12.948011

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