Development of next-generation nanolithography methods to break the optical diffraction limit

Huiwen Luo; Liang Wang; Jin Qin; Li Ding

doi:10.1117/12.2240741

31 October 2016 Development of next-generation nanolithography methods to break the optical diffraction limit

Huiwen Luo, Liang Wang, Jin Qin, Li Ding

Proceedings Volume 10019, Optoelectronic Devices and Integration VI; 100190H (2016) https://doi.org/10.1117/12.2240741
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

Photolithography has been one of the most important technologies in modern society, especially in semiconductor industry. However, due to the limitation of optical diffraction, this technique becomes more and more complex and expensive. In this paper, we experimentally study two promising techniques, near-field scanning optical lithography and nanoimprint lithography, which both have been proved to be alternatives to photolithography, and achieve sub-wavelength resolution. Taking advantage of bowtie apertures, near-field scanning optical lithography can achieve high resolution beyond the Rayleigh diffractive limit. Here, we report a novel method to fabricate bowtie aperture with sub-15 nm gap, producing highly confined electric near-field by localized surface plasmon (LSP) excitation and nanofocusing of the closely tapered gap, and obtain lithography results with 21 nm resolution (FWHM).We also develop a new plate-to-roll nanoimprint lithography (P2RNIL). Compared with plate-to-plate nanoimprint lithography (P2PNIL) and roll-to-plate nanoimprint lithography (R2PNIL), it avoids cylinder template fabrication in P2RNIL and significantly improves the productivity in P2PNIL. Our P2RNIL system can realize large-area nanoimprint continuously with high resolution and high speed.

Citation Download Citation

Huiwen Luo, Liang Wang, Jin Qin, and Li Ding "Development of next-generation nanolithography methods to break the optical diffraction limit", Proc. SPIE 10019, Optoelectronic Devices and Integration VI, 100190H (31 October 2016); https://doi.org/10.1117/12.2240741

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KEYWORDS

Lithography

Nanoimprint lithography

Optical lithography

Coating

Near field

Diffraction

Near field optics

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