Front Matter: Volume 10146
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014601 (2017) https://doi.org/10.1117/12.2279325
Keynote Session
Chi-Chun Liu, Elliott Franke, Yann Mignot, Scott LeFevre, Stuart Sieg, Cheng Chi, Luciana Meli, Doni Parnell, Kristin Schmidt, et al.
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014603 (2017) https://doi.org/10.1117/12.2260479
EUV Materials I: Metal-Based EUV Resists: Joint Session with Conferences 10146 and 10143
W. D. Hinsberg, S. Meyers
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014604 (2017) https://doi.org/10.1117/12.2260265
Steven Grzeskowiak, Amrit Narasimhan, Michael Murphy, Lee Napolitano, Daniel A. Freedman, Robert L. Brainard, Greg Denbeaux
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014605 (2017) https://doi.org/10.1117/12.2258151
Yu Zhang, Jarich Haitjema, Xiaomeng Liu, Fredrik Johansson, Andreas Lindblad, Sonia Castellanos, Niklas Ottosson, Albert M. Brouwer
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014606 (2017) https://doi.org/10.1117/12.2257893
EUV Materials II: Fundamentals I: Joint Session with Conferences 10146 and 10143
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014607 (2017) https://doi.org/10.1117/12.2257933
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014608 https://doi.org/10.1117/12.2260475
EUV Materials III: Fundamentals II
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014609 (2017) https://doi.org/10.1117/12.2261434
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460A (2017) https://doi.org/10.1117/12.2257899
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460B (2017) https://doi.org/10.1117/12.2258693
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460C (2017) https://doi.org/10.1117/12.2257835
Ke Du, Meiliana Siauw, David Valade, Marek Jasieniak, Nico Voelcker, Peter Trefonas III, Jim Thackeray, Idriss Blakey, Andrew Whittaker
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460D (2017) https://doi.org/10.1117/12.2270480
EUV Materials IV: Novel Materials and Processes
Michihiro Shirakawa, Hideaki Tsubaki, Hajime Furutani, Wataru Nihashi, Naohiro Tango, Kazuhiro Marumo, Kei Yamamoto, Hidenori Takahashi, Akiyoshi Goto, et al.
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460E (2017) https://doi.org/10.1117/12.2257956
Seiji Nagahara, Michael Carcasi, Gosuke Shiraishi, Hisashi Nakagawa, Satoshi Dei, Takahiro Shiozawa, Kathleen Nafus, Danilo De Simone, Geert Vandenberghe, et al.
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460G (2017) https://doi.org/10.1117/12.2258217
William Earley, Deanna Soucie, Kenji Hosoi, Arata Takahashi, Takashi Aoki, Brian Cardineau, Koichi Miyauchi, Jay Chun, Michael O'Sullivan, et al.
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460H (2017) https://doi.org/10.1117/12.2258324
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460I (2017) https://doi.org/10.1117/12.2258118
Patterning Materials and Etch: Joint Session with Conferences 10146 and 10149
M. Glodde, R. L. Bruce, M. J. P. Hopstaken, M. R. Saccomanno, N. Felix, K. E. Petrillo, B. Price
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460J (2017) https://doi.org/10.1117/12.2258012
Frederic Lazzarino, Sara Paolillo, Anthony Peter, David De Roest, TaeGeun Seong, Yizhi Wu, Stefan Decoster, Vito Rutigliani, Gian Francesco Lorusso, et al.
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460K (2017) https://doi.org/10.1117/12.2258040
Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala, Matias Kagias, Zhentian Wang, Li Wang, Christian Dais, Harun Solak, Marco Stampanoni
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460L (2017) https://doi.org/10.1117/12.2258007
3D Resist Effects and Modeling: Joint Session with Conferences 10146 and 10147
Thomas Mülders, Hans-Jürgen Stock, Bernd Küchler, Ulrich Klostermann, Weimin Gao, Wolfgang Demmerle
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460M (2017) https://doi.org/10.1117/12.2257909
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460N (2017) https://doi.org/10.1117/12.2258201
DSA Process and Integration: Joint Session with Conferences 10146 and 10144
Tsukasa Azuma, Yuriko Seino, Hironobu Sato, Yusuke Kasahara, Katsuyoshi Kodera, Phubes Jiravanichsakul, Teruaki Hayakawa, Kenji Yoshimoto, Mikihito Takenaka
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460O https://doi.org/10.1117/12.2257936
Paulina A. Rincon-Delgadillo, Gayle Murdoch, Roel Gronheid, Ryoung-Han Kim, Jürgen Bömmels
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460P https://doi.org/10.1117/12.2260494
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460Q (2017) https://doi.org/10.1117/12.2260454
DSA Materials and Processes: Joint Session with Conferences 10146 and 10144
Jan Doise, Boon Teik Chan, Masafumi Hori, Roel Gronheid
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460R (2017) https://doi.org/10.1117/12.2259791
Laura Evangelio Araujo, Marta Fernández-Regúlez, Xavier Chevalier, Célia Nicolet, Ian Cayrefourcq, Christophe Navarro, Guillaume Fleury, Francesc Pérez-Murano
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460S https://doi.org/10.1117/12.2258132
DSA Novel Materials
Kui Xu, Mary Ann Hockey, Eric Calderas, Douglas Guerrero, Daniel Sweat, Jeffrey Fiehler, Richard Daugherty
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460U (2017) https://doi.org/10.1117/12.2257354
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460W (2017) https://doi.org/10.1117/12.2261094
Kazuyo Morita, Kimiko Yamamoto
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460Y (2017) https://doi.org/10.1117/12.2257625
DSA Modelling and Fundamentals
Jimmy Liu, Kris T. Delaney, Glenn H. Fredrickson
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101460Z (2017) https://doi.org/10.1117/12.2258106
Alec Bowen, Azat Latypov, Todd Bailey
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014610 (2017) https://doi.org/10.1117/12.2258709
Corinne L. Carpenter, Kris T. Delaney, Glenn H. Fredrickson
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014611 (2017) https://doi.org/10.1117/12.2257687
Daniel Sunday, Christopher Liman, Adam F. Hannon, Jiaxing Ren, Xuanxuan Chen, Hyo Seon Suh, Juan J. de Pablo, Paul F. Nealey, R. Joseph Kline
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014612 https://doi.org/10.1117/12.2258047
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014613 (2017) https://doi.org/10.1117/12.2257953
Hardmasks and Underlayer Materials
Anuja De Silva, Indira Seshadri, Kisup Chung, Abraham Arceo, Luciana Meli, Brock Mendoza, Yasir Sulehria, Yiping Yao, Madhana Sunder, et al.
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014615 (2017) https://doi.org/10.1117/12.2258380
Yushin Park, Seungwook Shin, Yunjun Kim, Seunghyun Kim, Jaebum Lim, Sung Hwan Kim, Hyeonil Jung, Chungheon Lee, Miyeon Han, et al.
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014616 (2017) https://doi.org/10.1117/12.2257846
Hiroto Ogata, Yuto Hashimoto, Yuki Usui, Mamoru Tamura, Tomoya Ohashi, Yasushi Sakaida, Takahiro Kishioka
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014617 (2017) https://doi.org/10.1117/12.2257664
Toby Hopf, Monique Ercken, Geert Mannaert, Eddy Kunnen, Zheng Tao, Nadia Vandenbroeck, Farid Sebaai, Yoshiaki Kikuchi, Hans Mertens, et al.
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014618 (2017) https://doi.org/10.1117/12.2257668
Shrawan Singhal, Michelle M. Grigas, Niyaz Khusnatdinov, Srinivasan V. Sreenivasan
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014619 https://doi.org/10.1117/12.2261400
Niyaz Khusnatdinov, Gary Doyle, Douglas J. Resnick, Zhengmao Ye, Dwayne LaBrake, Brennan Milligan, Fred Alokozai, Jerry Chen
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461A (2017) https://doi.org/10.1117/12.2260455
Process Integration and Multipatterning
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461B (2017) https://doi.org/10.1117/12.2257868
Jong Keun Park, Phillip D. Hustad, Emad Aqad, David Valeri, Mike D. Wagner, Mingqi Li
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461C https://doi.org/10.1117/12.2258667
Rui Chen, Granger Lobb, Aleksandra Clancy, Bradley Morgenfeld, Shyam Pal
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461D (2017) https://doi.org/10.1117/12.2260450
Erika Yang, Byunghoon Ryu, Hongsuk Nam, Xiaogan Liang
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461E https://doi.org/10.1117/12.2258197
Poster Session: Advanced Processes
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461F (2017) https://doi.org/10.1117/12.2258215
Hsing-Chieh Lee, Ying-Hao Lu, Shin-Yih Huang, Wei-Jen Lan, Makoto Hanabata
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461G (2017) https://doi.org/10.1117/12.2255875
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461H (2017) https://doi.org/10.1117/12.2256649
Makoto Hanabata, Satoshi Takei, Shinya Nakajima, Naoto Sugino, Yoko Matsumoto, Atsushi Sekiguchi
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461I (2017) https://doi.org/10.1117/12.2257095
Tetsu Kohyama, Fumiya Kaneko, Saksatha Ly, James Hamzik, Jad Jaber, Yoshiaki Yamada
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461J (2017) https://doi.org/10.1117/12.2257388
Atsushi Sekiguchi, Yoko Matsumoto, Yoshihisa Sensu, Satoshi Takei, Makoto Hanabata, Hatsuyuki Tanaka
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461K (2017) https://doi.org/10.1117/12.2257548
Daeyoup Lee, Phillip Tatti, Richard Lee, Jack Chang, Winston Cho, Sanggil Bae
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461L (2017) https://doi.org/10.1117/12.2258099
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461M (2017) https://doi.org/10.1117/12.2258154
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461N (2017) https://doi.org/10.1117/12.2258221
C. J. Tu, C. H. Huang, Elvis Yang, T. H. Yang, K. C. Chen
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461P (2017) https://doi.org/10.1117/12.2256653
Landobasa Y. M. Tobing, Dao Hua Zhang
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461Q (2017) https://doi.org/10.1117/12.2272621
Benjamin D. Nation, Caleb L. Breaux, Peter J. Ludovice, Clifford L. Henderson
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461T (2017) https://doi.org/10.1117/12.2276197
Poster Session: Directed Self-Assembly
Masahiko Harumoto, Harold Stokes Jr., Yuji Tanaka, Koji Kaneyama, Chalres Pieczulewski, Masaya Asai, Maxime Argoud, Isabelle Servin, Gaëlle Chamiot-Maitral, et al.
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461X (2017) https://doi.org/10.1117/12.2257945
Yasunobu Someya, Ryuta Mizuochi, Hiroyuki Wakayama, Shinsuke Tadokoro, Masami Kozawa, Rikimaru Sakamoto
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461Y (2017) https://doi.org/10.1117/12.2258145
Toshiyuki Himi, Ryota Matsuki, Terumasa Kosaka, Ryosuke Ogaki, Yukio Kawaguchi, Tetsuo Shimizu
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101461Z (2017) https://doi.org/10.1117/12.2258167
Poster Session: Underlayer Materials
Taeho Kim, Youngmin Kim, Sunmin Hwang, Hyunsoo Lee, Miyeon Han, Sanghak Lim
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014623 (2017) https://doi.org/10.1117/12.2257867
Huichan Yun, Jinhyung Kim, Youjung Park, Yoona Kim, Seulgi Jeong, Jaeyeol Baek, Byeri Yoon, Sanghak Lim
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014624 (2017) https://doi.org/10.1117/12.2257880
Takafumi Endo, Rikimaru Sakamoto, Keisuke Hashimoto, Daigo Saito, Hirokazu Nishimaki, Ryo Karasawa, Hikaru Tokunaga
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014625 (2017) https://doi.org/10.1117/12.2257974
Tomoaki Takigawa, Junya Horiuchi, Naoya Uchiyama, Kana Okada, Yoko Shimizu, Takashi Makinoshima, Takashi Sato, Masatoshi Echigo
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014626 (2017) https://doi.org/10.1117/12.2257975
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014627 (2017) https://doi.org/10.1117/12.2257983
Poster Session: Filtration
Toru Umeda, Shusaku Daikoku, Shuichi Tsuzuki, Tetsuya Murakami
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 1014629 (2017) https://doi.org/10.1117/12.2257937
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101462A (2017) https://doi.org/10.1117/12.2258582
Rao Varanasi, Michael Mesawich, Patrick Connor, Lawrence Johnson
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101462B (2017) https://doi.org/10.1117/12.2260001
Steven Grzeskowiak, Amrit Narasimhan, Michael Murphy, Christian Ackerman, Jake Kaminsky, Robert L. Brainard, Greg Denbeaux
Proceedings Volume Advances in Patterning Materials and Processes XXXIV, 101462C (2017) https://doi.org/10.1117/12.2274128
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