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19 October 2016 Wavefront reconstruction algorithm based on interpolation coefficients for radial shearing interferometry
Chen Zhang, Dahai Li, Mengyang Li, Kewei E.
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Proceedings Volume 10155, Optical Measurement Technology and Instrumentation; 1015539 (2016) https://doi.org/10.1117/12.2247361
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China
Abstract
A new wavefront reconstruction algorithm for radial shearing interferometer is proposed. Based on the shearing relationship between the expanded wavefront and the test wavefront, the interpolation coefficient matrix are established by the radial shearing ratio and the number of discrete points of test wavefront. Accordingly, the expanded wavefront can be described by an interpolation coefficient matrix and the test wavefront. Then the test wavefront can be calculated from the phase difference wavefront which comes from any radial shearing interferometer. The numerical simulation proves the correctness of the algorithm. The main error source of this algorithm has been analyzed and the error propagation coefficient has been calculated at last. Above results show that the proposed algorithm is an effective and correct algorithm to reconstruct wavefront for radial shearing interferometer.
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Chen Zhang, Dahai Li, Mengyang Li, and Kewei E. "Wavefront reconstruction algorithm based on interpolation coefficients for radial shearing interferometry", Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 1015539 (19 October 2016); https://doi.org/10.1117/12.2247361
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KEYWORDS
Interferometry
Metrology
Phase measurement
Reconstruction algorithms
Wavefront reconstruction
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