A 1 kW E-Beam Pumped Excimer Laser

Craig F. Zahnow

doi:10.1117/12.950127

26 April 1989 A 1 kW E-Beam Pumped Excimer Laser

Craig F. Zahnow

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950127
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

The design and operation of a large, repetitively pulsed e-beam laser is described. The laser is capable of 100 Hz operation and has an average power of over 1 kW.

Citation Download Citation

Craig F. Zahnow "A 1 kW E-Beam Pumped Excimer Laser", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950127

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