Paper
3 November 1994 Methods for monolithically fabricating photonic integrated circuits
Emil S. Koteles
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Abstract
The development of a practical technique for monolithically integrating optoelectronic components on a semiconductor chip is necessary in order to unleash the full capacity of the optical fiber based information superhighway. This paper establishes the criteria for photonic integration, reviews the progress achieved by several techniques presently being actively studied (in particular, selective area regrowth, selective area growth, and selective area quantum well intermixing), and critiques their near and long term futures. Since practicality implies low cost which, in turn, implies simplicity in growth and processing, initial photonic integrated circuits (PIC) will likely involve a tradeoff between manufacturability and performance. Thus, elementary PICs fabricated using the simplest technologies will emerge in the marketplace first. In the longer term, as growth and processing are brought under better control, more sophisticated PICs using complex integration technologies will also become available.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Emil S. Koteles "Methods for monolithically fabricating photonic integrated circuits", Proc. SPIE 10278, Defining the Global Information Infrastructure: Infrastructure, Systems, and Services: A Critical Review, 102780C (3 November 1994); https://doi.org/10.1117/12.192183
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Cited by 2 scholarly publications.
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KEYWORDS
Photonic integrated circuits

Manufacturing

Optical fibers

Optoelectronic devices

Quantum wells

Semiconductors

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