Design And Construction Of A Phase-Locked Interference Microscope

Glen W. Johnson; Duncan T. Moore

doi:10.1117/12.955401

10 August 1977 Design And Construction Of A Phase-Locked Interference Microscope

Glen W. Johnson, Duncan T. Moore

Author Affiliations +

Proceedings Volume 0103, Systems Integration and Optical Design: Another Look; (1977) https://doi.org/10.1117/12.955401
Event: 1977 SPIE/SPSE Technical Symposium East, 1977, Reston, United States

Abstract

An A.C. interference microscope based on a technique called phase-locked interferometry has been constructed. The instrument is capable of detecting phase differences approaching λ/100. It may be used for measuring surface features (roughness, curvature) or transparent phase objects such as gradient index materials, microballoons and biological samples.

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Glen W. Johnson and Duncan T. Moore "Design And Construction Of A Phase-Locked Interference Microscope", Proc. SPIE 0103, Systems Integration and Optical Design: Another Look, (10 August 1977); https://doi.org/10.1117/12.955401

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