The study presented here shows that this method can also lead to misinterpretations. Known relationships, such as the influence of the polishing pad, the concentration of the suspension and the influence of the processed materials play an important role. An extension of the procedure of DIN 58750-3 for the test of a polishing agent can help in a task-specific characterization of polishing slurries. |
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Polishing
Glasses
Surface finishing
Particles
Chemical mechanical planarization
Materials processing
Precision optics