Metal-Silicide Formation With Laser Pulses

A. Luches; G Leggieri; E. D'Anna

doi:10.1117/12.950625

18 May 1989 Metal-Silicide Formation With Laser Pulses

A. Luches, G Leggieri, E. D'Anna

Proceedings Volume 1033, Trends in Quantum Electronics; (1989) https://doi.org/10.1117/12.950625
Event: International Conference on Trends in Quantum Electronics, 1988, Bucharest, Romania

Abstract

The most relevant results obtained in the field of the synthesis of metal suicides with pulsed lasers in the nanosecond regime are reviewed. Particular emphasis is given to the results obtained in our laboratories. Formation of stable and metastable compounds, their structure and the surface morphology of the irradiated materials are discussed. The reaction kinetics is investigated through a comparison of the experimental results with the temperatures of the irradiated samples, calculated by solving the heat diffusion equation.

Citation Download Citation

A. Luches, G Leggieri, and E. D'Anna "Metal-Silicide Formation With Laser Pulses", Proc. SPIE 1033, Trends in Quantum Electronics, (18 May 1989); https://doi.org/10.1117/12.950625

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