Modification Of Surfaces Under The Action Of UV Laser Radiation

V. P. Ageev; V. I . Konov; A. V. Kuzmichev

doi:10.1117/12.950618

18 May 1989 Modification Of Surfaces Under The Action Of UV Laser Radiation

V. P. Ageev, V. I . Konov, A. V. Kuzmichev

Proceedings Volume 1033, Trends in Quantum Electronics; (1989) https://doi.org/10.1117/12.950618
Event: International Conference on Trends in Quantum Electronics, 1988, Bucharest, Romania

Abstract

New results on excimer laser application for fine surface structurization are presented. There are considered peculiarities of the UV-photon induced processes of:(i) chemical deposition of carbon and silicon carbide films from CC1₄ and CH₃SiC1₃vapour precursors onto dielectric substrates,(ii) chemical etching of c-Si in CC1₄ vapour environment, and (iii) microstructures production by decomposition of organo-metallic (metal resinate) films. The fundamental role of superposition of thermal and photo-stimulated processes is also discussed.

Citation Download Citation

V. P. Ageev, V. I . Konov, and A. V. Kuzmichev "Modification Of Surfaces Under The Action Of UV Laser Radiation", Proc. SPIE 1033, Trends in Quantum Electronics, (18 May 1989); https://doi.org/10.1117/12.950618

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