Modeling surface imperfections in thin films and nanostructured surfaces

P.-E. Hansen; J. S. Madsen; S. A. Jensen; M. H. Madsen; M. Karamehmedovic

doi:10.1117/12.2270232

26 June 2017 Modeling surface imperfections in thin films and nanostructured surfaces

P.-E. Hansen, J. S. Madsen, S. A. Jensen, M. H. Madsen, M. Karamehmedovic

Proceedings Volume 10330, Modeling Aspects in Optical Metrology VI; 103300J (2017) https://doi.org/10.1117/12.2270232
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

Accurate scatterometry and ellipsometry characterization of non-perfect thin films and nanostructured surfaces are challenging. Imperfections like surface roughness make the associated modelling and inverse problem solution difficult due to the lack of knowledge about the imperfection on the surface. Combining measurement data from several instruments increases the knowledge of non-perfect surfaces. In this paper we investigate how to incorporate this knowledge of surface imperfection into inverse methods used in scatterometry and ellipsometry using the Rigorous Coupled Wave Analysis. Three classes of imperfections are examined. The imperfections are introduced as periodic structures with a super cell periods ten times larger than the simple grating period. Two classes of imperfections concern the grating and one class concern the substrate. It is shown that imperfections of a few nanometers can severely change the reflective response on silicon gratings. Inverse scatterometry analyses of gratings with imperfection using simulated data with white noise have been performed. The results show that scatterometry is a robust technology that is able to characterize grating imperfections provided that the imperfection class is known.

Citation Download Citation

P.-E. Hansen, J. S. Madsen, S. A. Jensen, M. H. Madsen, and M. Karamehmedovic "Modeling surface imperfections in thin films and nanostructured surfaces", Proc. SPIE 10330, Modeling Aspects in Optical Metrology VI, 103300J (26 June 2017); https://doi.org/10.1117/12.2270232

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available