Current Accuracy Limits Of Dynamic Imaging Microellipsometry

Ralph F. Cohn; James W. Wagner

doi:10.1117/12.950989

1 May 1989 Current Accuracy Limits Of Dynamic Imaging Microellipsometry

Ralph F. Cohn, James W. Wagner

Author Affiliations +

Proceedings Volume 1036, Precision Instrument Design; (1989) https://doi.org/10.1117/12.950989
Event: SPIE Advanced Processing Technologies for Optical and Electronic Devices (colocated wth OPTCON), 1988, Santa Clara, CA, United States

Abstract

Dynamic Imaging Microellipsometry (DIM) is a fast, high resolution full-field imaging approach to ellipsometry. The testing of the second generation DIM system is described with measurement methodology and system accuracy covered. Relative and absolute errors are discussed separately with analyses of overall accuracy and individual error sources are detailed. Approaches for improving both relative and absolute accuracy are discussed.

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Ralph F. Cohn and James W. Wagner "Current Accuracy Limits Of Dynamic Imaging Microellipsometry", Proc. SPIE 1036, Precision Instrument Design, (1 May 1989); https://doi.org/10.1117/12.950989

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