Influence of temperature and environment on the laser damage threshold of ion-beam sputtered anti-reflective coatings at 355 nm wavelength

Roelene Botha; Thomas Gischkat; Igor Stevanovic; Andreas Bächli; David Bischof; Markus Michler; Stefan J. Rinner; Carsten Ziolek

doi:10.1117/12.2281176

13 November 2017 Influence of temperature and environment on the laser damage threshold of ion-beam sputtered anti-reflective coatings at 355 nm wavelength

Roelene Botha, Thomas Gischkat, Igor Stevanovic, Andreas Bächli, David Bischof, Markus Michler, Stefan J. Rinner, Carsten Ziolek

Author Affiliations +

Proceedings Volume 10447, Laser-Induced Damage in Optical Materials 2017; 104472B (2017) https://doi.org/10.1117/12.2281176
Event: SPIE Laser Damage, 2017, Boulder, Colorado, United States

Abstract

In this investigation the influence of the local environment on the laser damage threshold of anti-reflective coatings is reported. For this purpose, HfO₂ / SiO₂ anti-reflective coatings were deposited on fused silica substrates using an ionbeam sputter system. Laser damage threshold measurements were performed using two test procedures, S-on-1 and Ron- 1, at 355 nm for temperatures ranging from room temperature up to 250 °C and in different atmospheres. The two test procedures had comparable LIDT results with a possible pre-conditioning effect evidenced by a broadening of the transition range of the R-on-1 measured samples. It was found that samples measured in normal atmospheric air showed superior laser resistance compared to samples measured under nitrogen purge or in dry air. Samples measured in normal atmospheric air also showed a temperature dependence with an improved laser resistance at 25 °C. No temperature dependence was observed for samples measured under nitrogen purge or in dry air. In this paper, literature showing similar effects is reviewed and the influence of a water epilayer on the coating as a possible cause for the observed results is discussed.

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Roelene Botha, Thomas Gischkat, Igor Stevanovic, Andreas Bächli, David Bischof, Markus Michler, Stefan J. Rinner, and Carsten Ziolek "Influence of temperature and environment on the laser damage threshold of ion-beam sputtered anti-reflective coatings at 355 nm wavelength", Proc. SPIE 10447, Laser-Induced Damage in Optical Materials 2017, 104472B (13 November 2017); https://doi.org/10.1117/12.2281176

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KEYWORDS

Coating

Laser damage threshold

Antireflective coatings

Ion beams

Humidity

Laser induced damage

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