A review of interferometric techniques with possible improvement in pattern resolution using near-field patterning

J. Y. Pae; Murukeshan V. M.

doi:10.1117/12.2270638

13 June 2017 A review of interferometric techniques with possible improvement in pattern resolution using near-field patterning

J. Y. Pae, Murukeshan V. M.

Author Affiliations +

Proceedings Volume 10449, Fifth International Conference on Optical and Photonics Engineering; 104491B (2017) https://doi.org/10.1117/12.2270638
Event: Fifth International Conference on Optical and Photonics Engineering, 2017, Singapore, Singapore

Abstract

In this paper, we will be initially doing review on the advancement of interference lithography (IL) which is a wellestablished technique for its facile, efficient, and economical approach to achieve large-scale patterning in a wide variety of substrates at sub-wavelength resolution. Following this, we have configured a two-beam IL patterning system to achieve patterns in a photoresist and verified against the theoretically calculated results. This work will be further extended using near-field patterning techniques to improve the resolution of the pattern as compared to the current conventional IL system. It is envisaged that the obtained initial results can be employed in a graphene substrate for further research and applications in the area of flexible electronics.

Citation Download Citation

J. Y. Pae and Murukeshan V. M. "A review of interferometric techniques with possible improvement in pattern resolution using near-field patterning", Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 104491B (13 June 2017); https://doi.org/10.1117/12.2270638

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE