Presentation + Paper
20 March 2018 DTCO exploration for efficient standard cell power rails
Bharani Chava, Julien Ryckaert, Luca Mattii, Syed Muhammad Yasser Sherazi, Peter Debacker, Alessio Spessot, Diederik Verkest
Author Affiliations +
Abstract
Standard cell track height scaling has been identified as an option to provide significant area savings. A direct consequence of track height reduction is that the width of the power rails needs to be reduced to accommodate patterning constraints as well as leave sufficient tracks for routing. Narrower power rails are highly resistive, reducing the headroom near an operating cell due to IR drop, which is not acceptable. For example, a 20% performance loss is observed due to a 10% supply voltage drop. To worsen the situation of IR drop, a slowdown in CPP scaling and newer metallization options are making the power rail highly sensitive and its design choice is a widely debated topic in the industry. Therefore, we propose an approach to define the power rail specifications and some feasible technology solutions to solve the power grid bottleneck.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bharani Chava, Julien Ryckaert, Luca Mattii, Syed Muhammad Yasser Sherazi, Peter Debacker, Alessio Spessot, and Diederik Verkest "DTCO exploration for efficient standard cell power rails", Proc. SPIE 10588, Design-Process-Technology Co-optimization for Manufacturability XII, 105880B (20 March 2018); https://doi.org/10.1117/12.2293500
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CITATIONS
Cited by 3 scholarly publications and 1 patent.
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KEYWORDS
Resistance

Ruthenium

Metals

Standards development

Capacitance

Copper

Optical lithography

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