Design and fabrication of narrowband 121.6nm minus filters

Xiaodong Wang; Bo Chen; Yang Liu; Tonglin Huo; Hongjun Zhou

doi:10.1117/12.2311654

5 June 2018 Design and fabrication of narrowband 121.6nm minus filters

Xiaodong Wang, Bo Chen, Yang Liu, Tonglin Huo, Hongjun Zhou

Proceedings Volume 10691, Advances in Optical Thin Films VI; 106911K (2018) https://doi.org/10.1117/12.2311654
Event: SPIE Optical Systems Design, 2018, Frankfurt, Germany

Abstract

In imaging detection of Lyman-a line of solar spectrum, in order to maintain spectral purity, a narrowband 121.6 nm minus filter is in urgent demand. Here, first-, second-, third-order narrowband 121.6 nm minus filters are designed, fabricated, and test. We just give our initial results, and due to complexity in characterization of optical constants in 115-130 nm, there are still significant deviations between design and experimental results.

Citation Download Citation

Xiaodong Wang, Bo Chen, Yang Liu, Tonglin Huo, and Hongjun Zhou "Design and fabrication of narrowband 121.6nm minus filters", Proc. SPIE 10691, Advances in Optical Thin Films VI, 106911K (5 June 2018); https://doi.org/10.1117/12.2311654

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