Evaluation of x-ray reflectors by optical diffraction patterns

Takayuki Hayashi; Takashi Okajima; Yang Soong

doi:10.1117/12.2310018

6 July 2018 Evaluation of x-ray reflectors by optical diffraction patterns

Takayuki Hayashi, Takashi Okajima, Yang Soong

Proceedings Volume 10699, Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray; 106993X (2018) https://doi.org/10.1117/12.2310018
Event: SPIE Astronomical Telescopes + Instrumentation, 2018, Austin, Texas, United States

Abstract

Performance of X-ray reflectors affects that of X-ray mirrors. Modern X-ray mirrors have thousands of reflectors to gain large effective area. Evaluation of the reflectors is an important process in production of the mirrors. A diffraction pattern dominates reflector image when the parallel optical beam illuminates the reflector along its optical axis because the reflectors are used at grazing incident angles of around 1 deg and their effective width are 1–10 mm. A diffraction pattern from the entire reflector surface can be acquired at once with the aid of a lens. The diffraction pattern holds information of the surface profiles of the reflectors. To quantitatively evaluate the reflectors with the diffraction pattern, we created a diffraction pattern model by the wave optics with the ideal surface profile and fitted it to data. As a result, a correlation between fitting residual and the normal vector distribution of the surface profile was found. With our method, the reflectors can be evaluated and sorted out more efficiently.

Citation Download Citation

Takayuki Hayashi, Takashi Okajima, and Yang Soong "Evaluation of x-ray reflectors by optical diffraction patterns", Proc. SPIE 10699, Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray, 106993X (6 July 2018); https://doi.org/10.1117/12.2310018

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